AVS 65th International Symposium & Exhibition

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Plasma Science and Technology Division Sessions

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Start Time Session Code Session Title
Monday 8:20am PS+AS+EM+SS-MoM Plasma-Surface Interactions
Monday 8:20am PS+TF-MoM Plasma Deposition and Plasma-Enhanced ALD
Monday 8:20am EM+MP+PS-MoM IoT Session: CMOS, Beyond the Roadmap and Over the Cliff
Monday 1:20pm PS+PB-MoA Plasma and Polymers: 'The Legacy of Riccardo d’Agostino and Beyond’
Monday 1:20pm EM+AM+NS+PS-MoA Atomic Layer Processing: Selective-Area Patterning (Assembly/Deposition/Etching)
Monday 1:20pm TF+EM+MI+PS-MoA Thin Films for Advanced Memory Applications and Magnetics
Tuesday 8:00am PS+EM+SE-TuM Plasma Processing of Challenging Materials - I
Tuesday 8:00am PS+PB-TuM Plasma Medicine
Tuesday 8:00am SE+PS-TuM Plasma-assisted Surface Modification and Deposition Processes
Tuesday 8:00am SS+HC+NS+PS-TuM Controlling Mechanisms of Surface Chemical Reactions
Tuesday 8:00am TF+AM+EM+PS-TuM Atomic Layer Processing: Area Selective Deposition
Tuesday 2:20pm PS+EM+NS+SS-TuA Plasma Processing of Challenging Materials - II
Tuesday 2:20pm PS+PB+SE-TuA Atmospheric Pressure Plasmas
Tuesday 2:20pm TF+PS-TuA Atomic Layer Processing: Chemistry & Surface Reactions for Atomic Layer Processing
Tuesday 6:30pm PS-TuP Plasma Science and Technology Division Poster Session
Wednesday 8:00am PS+AS+EL+EM+SE-WeM Current and Future Stars of the AVS Symposium I
Wednesday 8:00am PS+EM-WeM Advanced Patterning
Wednesday 8:00am PS+MN-WeM IoT Session: Enabling IoT Era
Wednesday 8:00am MN+NS+PS-WeM IoT Session: Multiscale Manufacturing: Enabling Materials and Processes
Wednesday 2:20pm PS+EM-WeA Advanced BEOL/Interconnect Etching
Wednesday 2:20pm PB+BI+PC+PS-WeA Plasma Agriculture & Environmental Applications
Thursday 8:00am PS+EM+TF-ThM Atomic Layer Processing: Atomic Layer Etching
Thursday 8:00am PS-ThM Plasma Sources
Thursday 8:00am NS+AN+EM+MI+MN+MP+PS+RM-ThM Nanopatterning and Nanofabrication
Thursday 8:00am TF+AS+EL+PS-ThM In-situ Characterization and Modeling of Thin Film Processes
Thursday 8:00am TF+PS-ThM Deposition Processes for 3D and Extreme Geometries
Thursday 2:20pm PS+EM+TF-ThA Atomic Layer Processing: Integration of ALD and ALE
Thursday 2:20pm PS-ThA Plasma Diagnostics, Sensors and Controls
Thursday 2:20pm EM+2D+NS+PS+RM+TF-ThA IoT Session: Flexible Electronics & Flash Networking Session
Thursday 2:20pm SS+EM+PS+TF-ThA Deposition, Etching and Growth at Surfaces
Thursday 2:20pm TF+AS+EL+EM+NS+PS+SS-ThA IoT Session: Thin Films for Flexible Electronics and IoT
Friday 8:20am PS-FrM Plasma Modeling
Friday 8:20am NS+AM+AS+MN+PC+PS+SS+TR-FrM SPM – Probing Chemical Reactions at the Nanoscale

AVS 65th International Symposium & Exhibition