AVS 65th International Symposium & Exhibition
    Plasma Science and Technology Division Monday Sessions

Session PS+TF-MoM
Plasma Deposition and Plasma-Enhanced ALD

Monday, October 22, 2018, 8:20 am, Room 104C
Moderators: Kazunori Koga, Kyushu University, Japan, Erwine Pargon, LTM, Univ. Grenoble Alpes, CEA-LETI, France


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  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

8:20am PS+TF-MoM1
ZrO2 Deposition using a 2.45 GHz Atmospheric Pressure Plasma Torch
Dhruval Patel, L. Bonova, C. Ahn, D.V. Krogstad, D.N. Ruzic, University of Illinois at Urbana-Champaign, S. Chaudhuri, University of Illinois at Chicago
8:40am PS+TF-MoM2
Ion Energy Characteristics during Plasma-Enhanced Atomic Layer Deposition and their Role in Tailoring Material Properties
Tahsin Faraz, K. Arts, S. Karwal, M.C. Creatore, Eindhoven University of Technology, The Netherlands, H.C.M. Knoops, Oxford Instruments, The Netherlands, W.M.M. Kessels, Eindhoven University of Technology, The Netherlands
9:00am PS+TF-MoM3 Invited Paper
Plasma Deposition of Functional, Nanostructured Coatings on Materials and Nanomaterials Derived from the Wood Biomass
Luc Stafford, Université de Montréal, Canada
9:40am PS+TF-MoM5
Mechanisms of Halogenated Silane Decomposition on an N-rich Surface during Atomic Layer Deposition of Silicon Nitride
Gregory Hartmann, University of Texas at Austin, P.L.G. Ventzek, Tokyo Electron America, Inc., K. Ishibashi, T. Iwao, Tokyo Electron Technology Solutions Ltd., Japan, G.S. Hwang, University of Texas at Austin
10:00am PS+TF-MoM6
Characterization of Inductively Coupled Plasma Source for Plasma Enhanced Atomic Layer Deposition
Premkumar Panneerchelvam, A. Agarwal, KLA-Tencor, D.R. Boris, S.G. Walton, Naval Research Laboratory
10:40am PS+TF-MoM8
Structural, Optical, and Electrical Properties of Plasma-Enhanced Atomic Layer Deposited ZnO: Influence of Substrate Temperature
Julian Pilz, A. Perrotta, A.M. Coclite, Graz University of Technology, Austria
11:00am PS+TF-MoM9
Critical Effect of the Presence and Position of Double Bonds in the Atmospheric Plasma Synthesis of Organic Coatings
Jérémy Mertens, J. Baneton, A. Ozkan, F. Reniers, Université Libre de Bruxelles, Belgium
11:20am PS+TF-MoM10
Capacitively Coupled DC/RF Discharges for PEALD Process of Titanium Dioxide Films
Shinya Iwashita, A. Suzuki, T. Shindo, T. Kikuchi, T. Matsudo, Y. Morita, T. Moriya, Tokyo Electron Technology Solutions Ltd., Japan, A. Uedono, University of Tsukuba, Japan
11:40am PS+TF-MoM11
The Effects of Varying Plasma Conditions on Plasma Enhanced Atomic Layer Epitaxy
D.R. Boris, V.D. Wheeler, U.S. Naval Research Laboratory, V.R. Anderson, Kennesaw State University, N. Nepal, U.S. Naval Research Laboratory, S.G. Rosenberg, A.C. Kozen, ASEE Postdoctoral Fellow, S.G. Walton, U.S. Naval Research Laboratory, Charles R. Eddy, Jr., U. S. Naval Research Laboratory