AVS 65th International Symposium & Exhibition
    Plasma Science and Technology Division Tuesday Sessions

Session PS+EM+NS+SS-TuA
Plasma Processing of Challenging Materials - II

Tuesday, October 23, 2018, 2:20 pm, Room 104A
Moderators: Michael Gordon, University of California at Santa Barbara, Wei Tian, Applied Materials Inc.


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  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

2:20pm PS+EM+NS+SS-TuA1 Invited Paper
Self-limiting Growth of III-nitride Materials via Hollow-cathode Plasma-ALD: Structural and Chemical Analysis
Necmi Biyikli, A. Mohammad, D. Shukla, University of Connecticut
3:00pm PS+EM+NS+SS-TuA3
Electrostatic Charge of Solution-droplet in Plasma-coupled Micro Reactor
Tae Hwan Kim, SW. Lee, National Fusion Research Institute, Republic of Korea
3:20pm PS+EM+NS+SS-TuA4
Surfactant-free and Stable Colloidal Metal Oxide Ultra-small Quantum Dots via Plasma-liquid Electrochemistry
Dillibabu Padmanaban, D. Carolan, R. McGlynn, T. Velusamy, P. Maguire, D. Mariotti, Nanotechnology & Integrated Bio-Engineering Centre, Ulster University, UK
4:20pm PS+EM+NS+SS-TuA7
From Organometallic Precursors to Bimetallic Nanocatalysts using Atmospheric-pressure Plasma Processes
Joffrey Baneton, J. Mertens, M. Smiljanic, S. Cauchies, T. Segato, Université Libre de Bruxelles, Belgium, Y. Busby, Université de Namur, Belgium, G. Caldarella, Université de Liège, Belgium, V. Debaille, S. Godet, Université Libre de Bruxelles, Belgium, J.-J. Pireaux, Université de Namur, Belgium, N. Job, Université de Liège, Belgium, M.J. Gordon, University of California at Santa Barbara, R.M. Sankaran, Case Western Reserve University, F. Reniers, Université Libre de Bruxelles, Belgium
4:40pm PS+EM+NS+SS-TuA8
Synthesis of Hydrogenated Amorphous Carbon Nanoparticles using High-Pressure CH4+Ar Plasmas and Their Deposition
Kazunori Koga, S.H. Hwang, K. Kamataki, N. Itagaki, Kyushu University, Japan, T. Nakatani, Okayama University of Science, Japan, M. Shiratani, Kyushu University, Japan
5:00pm PS+EM+NS+SS-TuA9
Antimony-doped Tin Oxide Nanocrystals Synthesized by Low Temperature Plasma
Qinyi Chen, E. Thimsen, Washington University in St. Louis
5:20pm PS+EM+NS+SS-TuA10
Femtosecond Laser Texturing of Plasma-immersed Ti to Create TiN
Chisung Ahn, E. Barlaz, D.N. Ruzic, University of Illinois at Urbana-Champaign
5:40pm PS+EM+NS+SS-TuA11
Modeling Chemical Reactions in Contact Glow Discharge Electrolysis
Bocong Zheng, M. Shrestha, K.L. Wang, T. Schuelke, Q.H. Fan, Michigan State University
6:00pm PS+EM+NS+SS-TuA12
Effects of Light Ion Beam Irradiation in Plasma Etching Processes
Kazuhiro Karahashi, T. Ito, H. Li, M. Isobe, K. Mizotani, S. Shigeno, Osaka University, Japan, M. Fukasawa, A. Hirata, T. Tatsumi, Sony Semiconductor Solutions Corporation, Japan, S. Hamaguch, Osaka University, Japan