AVS 65th International Symposium & Exhibition
    Plasma Science and Technology Division Wednesday Sessions

Session PS+MN-WeM
IoT Session: Enabling IoT Era

Wednesday, October 24, 2018, 8:00 am, Room 104C
Moderators: Ankur Agarwal, KLA-Tencor, David Lishan, Plasma-Therm LLC


  Click here to Download program book for this session  
  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

8:00am PS+MN-WeM1 Invited Paper
A "Moore's Law" for Packaging
Subramanian Iyer, University of California at Los Angeles
8:40am PS+MN-WeM3
Fabrication, Chemical Lift-Off and Optical Characterization of Nanoscale III-Nitride Light Emitters
Lesley Chan, C.D. Pynn, P. Shapturenka, T. Margalith, S.P. DenBaars, M.J. Gordon, University of California at Santa Barbara
9:00am PS+MN-WeM4
High Radical Flux, with Low Ion and Photon Flux, Plasma Source, for MEM’S Technology
Marc Segers, Y. Pilloux, D. Lishan, S. FERRAND, Plasma-Therm LLC
9:20am PS+MN-WeM5 Invited Paper
Use of Plasma in Advanced Packaging
Michael Seddon, ON Semi
11:00am PS+MN-WeM10 Invited Paper
Low Temperature Plasmas in Nanotechnology Applications
Meyya Meyyappan, NASA Ames Research Center
11:40am PS+MN-WeM12
Gas Phase Synthesis of Pure III-V Semiconductor Nanoparticles from Bulk Metals by using Low Temperature Plasma
Necip Berker Uner, E. Thimsen, Washington University in St. Louis
12:00pm PS+MN-WeM13
Investigation of Fundamental Hydrocarbon Plasma Chemistry for Unraveling Film Deposition Processes on Nanomaterials
Tara Van Surksum, E.R. Fisher, Colorado State University