| AVS 65th International Symposium & Exhibition | |
| Electronic Materials and Photonics Division | Monday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 1:20pm | EM+AM+NS+PS-MoA1 Area-Selective Deposition of Crystalline Perovskites E. Lin, Brennan Coffey, Z. Zhang, P.Y. Chen, B. Edmondson, J.G. Ekerdt, University of Texas at Austin |
| 1:40pm | EM+AM+NS+PS-MoA2 A Dry NF3/NH3 Plasma Clean for Removing Si Native Oxide and Leaving a Smooth Si Surface Christopher Ahles, J.Y. Choi, University of California, San Diego, A.C. Kummel, University of California at San Diego |
| 2:00pm | EM+AM+NS+PS-MoA3 Invited Paper Probing Strategies for Selective Deposition that Exploit Competitive Interactions James Engstrom, Cornell University |
| 2:40pm | EM+AM+NS+PS-MoA5 The Interconnect Resistivity Bottleneck Daniel Gall, T. Zhou, E. Milosevic, Rensselaer Polytechnic Institute, P.Y. Zheng, Micron Technology |
| 3:00pm | EM+AM+NS+PS-MoA6 Sub 0.3 micrometer Copper Patterns Etched with a Plasma-Based Process and Pattern Dependent Electromigration Failure Mechanism Yue Kuo, Texas A&M University |
| 3:40pm | EM+AM+NS+PS-MoA8 Invited Paper The Effect of Metal Diffusion on Contacts to Semiconducting Chalcogenides: Examples for 2D and 3D Materials Suzanne E. Mohney, K.A. Cooley, M. Abraham, A.C. Domask, H. Simchi, L. Kerstetter, C. Lawrence, T.N. Walter, The Pennsylvania State University |
| 4:20pm | EM+AM+NS+PS-MoA10 TiNx and TaNx Films via Low-T Thermal ALD using Anhydrous N2H4 Steven Wolf, M. Breeden, M. Kavrik, University of California at San Diego, D. Alvarez, J. Spiegelman, RASIRC, M. Naik, Applied Materials, A.C. Kummel, University of California at San Diego |