| AVS 65th International Symposium & Exhibition | |
| Thin Films Division | Tuesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 2:20pm | TF+PS-TuA1 Invited Paper N-heterocyclic Carbenes on Au and Cu Surfaces Cathleen Crudden, Queen's University, Canada |
| 3:00pm | TF+PS-TuA3 Enhancing Nucleation in Platinum Atomic Layer Deposition by Surface Pre-Treatment with Small Organometallic Molecules Camila de Paula, L. Zeng, S.F. Bent, Stanford University |
| 3:20pm | TF+PS-TuA4 Mass Spectrometer Studies of Volatile Etch Products Produced by Ligand-Exchange Reactions During Thermal Atomic Layer Etching Joel Clancey, A.S. Cavanagh, S.M. George, University of Colorado Boulder |
| 5:00pm | TF+PS-TuA9 Calculations of Etch Products from Thermal Atomic Layer Etching Using Fluorination and Ligand-Exchange Reactions Andrew Cavanagh, J.W. Clancey, S. Sharma, S.M. George, University of Colorado at Boulder |
| 5:20pm | TF+PS-TuA10 Formation of Monolayers and Multilayers During the Vapor-Phase Deposition of Dodecanethiols on Copper Oxide David Bergsman, T-L. Liu, R.G. Closser, S.F. Bent, Stanford University |
| 5:40pm | TF+PS-TuA11 Exchange Reactions During Atomic Layer Deposition: ZnO Conversion to Al2O3 by Trimethylaluminum Tyler Myers, A.M. Cano, J.W. Clancey, D.K. Lancaster, S.M. George, University of Colorado at Boulder |
| 6:00pm | TF+PS-TuA12 3D Feature Profile Simulation Coupled with Realistic Plasma Surface Reaction Model for ALE Process Y.H. Im, YeongGeun Yook, H.S. You, J.H. Park, Chonbuk National University, Republic of Korea, D.H. You, KW Tech, Republic of Korea, K.S. Choi, Chonbuk National University, Republic of Korea, W.S. Chang, National Fusion Research Institute, Republic of Korea |