AVS 65th International Symposium & Exhibition
    Thin Films Division Monday Sessions

Session TF+EM+MI+PS-MoA
Thin Films for Advanced Memory Applications and Magnetics

Monday, October 22, 2018, 1:20 pm, Room 102A
Moderator: Robert Grubbs, Micron Technology


  Click here to Download program book for this session  
  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

1:40pm TF+EM+MI+PS-MoA2
­­­Multiferroic Integration of Undoped Ferroelectric HfO2 and Ferrimagnetic CoFe2O4 Thin films by Radical-Enhanced Atomic Layer Deposition
J. Chang, Adrian Acosta, J.P. Chang, University of California at Los Angeles
2:00pm TF+EM+MI+PS-MoA3
Growth and Characterization of BeO Thin Films Grown by Atomic Layer Deposition using H2O and O3 as Oxygen Sources
Lee Woo Chul, C. Cheol Jin, Center for Electronic Materials, Korea Institute of Science and Technology, Korea, K. Sangtae, Center for Electronic Materials, Korea Institute of Science and Technology, Korea, L. Eric S., Y. Jung Hwan, Center for Multidimensional Carbon Materials (CMCM), Institute for Basic Science (IBS), South Korea, H. Cheol Seong, Department of Materials Science and Engineering, and Inter-University Semiconductor Research Center, College of Engineering, Seoul National University, South Korea, B. Christopher W., Center for Multidimensional Carbon Materials (CMCM), Institute for Basic Science (IBS), South Korea, K. Seong Keun, Center for Electronic Materials, Korea Institute of Science and Technology, Korea
2:20pm TF+EM+MI+PS-MoA4
Atomic Layer Deposition of Magnetic Films and Patterned Features with Tunable Magnetic Properties
Z. Zhang, John Ekerdt, University of Texas at Austin
2:40pm TF+EM+MI+PS-MoA5 Invited Paper
Tuning of the Magnetic and Electronic Properties of Epitaxial Heusler Compound Heterostructures
Christopher Palmstrøm, University of California, Santa Barbara
3:40pm TF+EM+MI+PS-MoA8
Stabilization of Ferroelectric Phase of Hf0.5Zr0.5O2on NbN at 4 K
Michael David Henry, S. Smith, R. Lewis, Sandia National Laboratories, J. Ihlefeld, University of Virginia
4:00pm TF+EM+MI+PS-MoA9
Atomic Layer Deposition of Co/Pt Multilayer films for Perpendicular Magnetic Anisotropy
Devika Choudhury, A.U. Mane, C.M. Phatak, A.K. Petford Long, J.W. Elam, Argonne National Laboratory