| AVS 65th International Symposium & Exhibition | |
| Electronic Materials and Photonics Division | Monday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 8:20am | EM+MP+PS-MoM1 Aluminum Gettering Gate for Improving Defect Density in SiGe MOSCAP Devices Emily Thomson, M. Kavrik, A.C. Kummel, University of California at San Diego |
| 8:40am | EM+MP+PS-MoM2 Direct Growth of Single Crystal Compound Semiconductor Materials on Diverse Substrates for Beyond the Roadmap Multifunctional Integrated Circuits Debarghya Sarkar, R. Kapadia, University of Southern California |
| 9:40am | EM+MP+PS-MoM5 Suppression of Electronic Defects at HfO2-SiGe Interface with Selective Surface Oxidation Using Ozone Mahmut Sami Kavrik, University of California at San Diego, V. Hou, TSMC, Taiwan, Republic of China, E. Thomson, University of California at San Diego, K. Tang, Stanford University, Y. Taur, University of California at San Diego, P.C. McIntyre, Stanford University, A.C. Kummel, University of California at San Diego |
| 10:00am | EM+MP+PS-MoM6 Surface Free Energy and Interfacial Strain in HfO2 and HZO Ferroelectric Formation Andrew Kummel, E. Chagarov, M. Kavrik, University of California at San Diego, M. Katz, N. Sanford, A. Davydov, National Institute of Standards and Technology (NIST), M. Lee, National Taiwan University |
| 10:40am | EM+MP+PS-MoM8 Invited Paper The Role of Selective Processes in the Atomic Scale Era Robert Clark, J. Smith, K.-H. Yu, K. Tapily, G. Pattanaik, S. Consiglio, T. Hakamata, C.S. Wajda, A. Raley, G.J. Leusink, TEL Technology Center, America, LLC |
| 11:20am | EM+MP+PS-MoM10 Selective Patterning of Silicon/Germanium Surfaces and Nanostructures via Surface Initiated Polymerization Amar Mohabir, T. Weiss, G. Tutuncuoglu, E.M. Vogel, M.A. Filler, Georgia Institute of Technology |
| 11:40am | EM+MP+PS-MoM11 Chemically Selective Imaging of Sequential Infiltration Synthesis with nm-scale Spatial Resolution D. Nowak, Tom Albrecht, Molecular Vista |