AVS 65th International Symposium & Exhibition
    Thin Films Division Thursday Sessions

Session TF+PS-ThM
Deposition Processes for 3D and Extreme Geometries

Thursday, October 25, 2018, 8:00 am, Room 104B
Moderators: Richard Vanfleet, Brigham Young University, AnnaMaria Coclite, Graz University of Technology


  Click here to Download program book for this session  
  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

8:00am TF+PS-ThM1
ALD and Diffusion in High Aspect Ratio Carbon Nanotube Forests
David Kane, R.C. Davis, R.R. Vanfleet, Brigham Young University
8:20am TF+PS-ThM2
Nanoporous Reference Substrates for ALD on High Aspect Ratio High Surface Area Materials
Dmitri Routkevitch, InRedox
8:40am TF+PS-ThM3
Fine-tuned Resistive Coatings for Detector Applications
Maximilian Gebhard, A.U. Mane, D. Choudhury, S. Letourneau, D.J. Mandia, Y. Zhang, J.W. Elam, Argonne National Laboratory
9:00am TF+PS-ThM4
Tungsten Atomic Layer Deposition on Vertically Aligned Carbon Nanotube Structures
Ryan Vanfleet, R.C. Davis, D.D. Allred, R.R. Vanfleet, Brigham Young University
9:20am TF+PS-ThM5 Invited Paper
ALD in Metal Organic Frameworks: Toward Single Site Synthesis and Sinter-Resistant Catalysts
Alex Martinson, Argonne National Laboratory
11:00am TF+PS-ThM10
Alumina Deposition by Atomic Layer Deposition (ALD) on Flat Surfaces and High Aspect Ratio Structures
Dhruv Shah, D.I. Patel, D.J. Jacobsen, J.E. Erickson, M.R. Linford, Brigham Young University
11:20am TF+PS-ThM11
Resistivity of the Alumina Diffusion Barrier in Catalytic Carbon Nanotube Growth
Berg Dodson, G. Chen, R.C. Davis, R.R. Vanfleet, Brigham Young University
11:40am TF+PS-ThM12
High Temperature Active CeO2 Nanorods Generated via Diffusion Limited Atomic Layer Deposition
Haoming Yan, X.Z. Yu, Q. Peng, University of Alabama