AVS 53rd International Symposium, Plasma Science and Technology Sessions

Plasma Science and Technology Sessions

Click a session title to see the papers

Start Time	Session Code	Session Title
Monday 8:00am	PS1-MoM	Etch for Advanced Interconnect I
Monday 8:00am	PS2-MoM	Advanced Gate Fabrication
Monday 2:00pm	PS-MoA	Manufacturing and Scientific Challenges for Plasma Processing at 32 nm
Tuesday 8:00am	PS1+MS+NM-TuM	Plasma Patterning
Tuesday 8:00am	PS2-TuM	Plasma Surface Interactions I: Joint AVS-AIChE Session
Tuesday 2:00pm	PS1-TuA	Emerging Plasma Applications
Tuesday 2:00pm	PS2-TuA	Etch for Advanced Interconnect II
Tuesday 6:00pm	PS1-TuP	Etching of High-K, Compound Semiconductors and Advanced Materials Poster Session
Tuesday 6:00pm	PS2-TuP	Etching and Process Integration Poster Session
Tuesday 6:00pm	PS3-TuP	Advanced Plasma Deposition Poster Session
Wednesday 8:00am	PS1-WeM	Plasma-Surface Interactions II
Wednesday 8:00am	PS2+TF-WeM	Plasma Deposition
Wednesday 2:00pm	PS1-WeA	Plasma-Wall Interactions and Plasma Sources
Wednesday 2:00pm	PS2-WeA	Atmospheric and Microplasmas
Thursday 8:00am	PS1+BI-ThM	Plasmas in Bioscience
Thursday 8:00am	PS2-ThM	Plasmas and Polymers
Thursday 2:00pm	PS1-ThA	Plasma Processing for High-K/III-V’s and Smart Materials
Thursday 2:00pm	PS2-ThA	Plasma Modeling
Thursday 2:00pm	MS-ThA	Sensors, Metrology, and Control
Thursday 5:30pm	PS-ThP	High Pressure Discharges and Novel Diagnostics & Sources Poster Session
Friday 8:00am	PS1-FrM	Plasma-Surface Interactions III
Friday 8:00am	PS2-FrM	Diagnostics