| AVS 53rd International Symposium | |
| Plasma Science and Technology | Friday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 8:00am | PS2-FrM1 Substrate Temperature Sensor Measurements and Analysis in an Inductively Coupled Plasma C.C. Hsu, M.J. Titus, D.B. Graves, University of California at Berkeley |
| 8:40am | PS2-FrM3 In-Situ Characterization of Oxygen Plasma Surface Etching by Infrared-Visible Sum Frequency Spectroscopy D. Farrow, G.A. Hebner, E.V. Barnat, Sandia National Laboratories |
| 9:00am | PS2-FrM4 Application of In Situ Plasma Analysis on Deep Trench Plasma Etch Hardware Design and Process Development S. Wege, A. Steinbach, S. Barth, A. Henke, J. Sobe, Qimonda, Dresden, Germany, M. Reinicke, J.-W. Bartha, Dresden University of Technology, Germany, G.D. Stancu, N. Lang, J. Roepke, Institute of Low Temperature Plasma Physics, Germany |
| 9:20am | PS2-FrM5 2D-t Plasma Image during One Bias Period of a 2f-CCP in Ar by Emission CT T. Ohmori, T. Kitajima, T. Makabe, Keio University, Japan |
| 9:40am | PS2-FrM6 Invited Paper Advanced Plasma Sources for the Next-Generation Processing H.-Y. Chang, S.-H. Seo, Korea Advanced Institute of Technology (KAIST) |
| 10:20am | PS2-FrM8 Real-time, Noninvasive Monitoring of Ion Energy and Ion Current at Insulating Electrodes M.A. Sobolewski, National Institute of Standards and Technology |
| 10:40am | PS2-FrM9 The Ion Energy Distributions in a High Power Impulse Magnetron Discharge J. Bohlmark, Chemfilt Ionsputtering AB, Sweden, M. Lattemann, Linköping Univ., Sweden, J.T. Gudmundsson, Univ. of Iceland, Iceland, A.P. Ehiasarian, Sheffield Hallam Univ., UK, Y.A. Gonzalvo, Hiden Analytical Ltd., UK, J. Carlsson, Chemfilt Ionsputtering AB, Sweden, N. Brenning, Royal Institute of Tech., Sweden, D. Lundin, U. Helmersson, Linköping Univ., Sweden |
| 11:00am | PS2-FrM10 Monitoring of Electron Density in Plasma Reactor with Frequency Shift Probe K. Nakamura, Chubu University, Japan, H. Sugai, Nagoya University, Japan |
| 11:20am | PS2-FrM11 Energy Distribution and Flux of Fast Neutrals and Residual Ions Extracted out of High Aspect-Ratio Holes in a Neutral Beam Source A. Ranjan, V.M. Donnelly, D.J. Economou, University of Houston |
| 11:40am | PS2-FrM12 Electron Energy Distribution Function Measurement in Radio-Frequency Plasmas Produced in Insulated Vessels H. Shindo, K. Kusaba, Tokai University, Japan |