AVS 54th International Symposium, Plasma Science and Technology Sessions

Plasma Science and Technology Sessions

Click a session title to see the papers

Start Time	Session Code	Session Title
Monday 8:00am	PS1-MoM	Plasma Modeling
Monday 8:00am	PS2+MS-MoM	Plasma Etching for Advanced Interconnects I
Monday 2:00pm	PS-MoA	Plasma Processing for High k, III-V and Smart Materials
Monday 2:00pm	SE+PS-MoA	Pulsed Plasmas in Surface Engineering
Tuesday 8:00am	PS1+TF-TuM	Plasma Enhanced Atomic Layer Deposition and Plasma Deposition
Tuesday 8:00am	PS2-TuM	Advanced Gate Etch
Tuesday 1:40pm	PS1-TuA	Plasma Etching for Advanced Interconnects II
Tuesday 1:40pm	PS2-TuA	Plasma Sources
Tuesday 6:00pm	PS-TuP	Plasma Science and Technology Poster Session
Wednesday 8:00am	PS1+NS-WeM	Plasmas in Nanotechnology
Wednesday 8:00am	PS2-WeM	Plasma-Surface Interactions I
Wednesday 1:40pm	PS1-WeA	Plasma-Wall Interactions
Wednesday 1:40pm	PS2-WeA	Plasmas and Polymers
Thursday 8:00am	PS1-ThM	Plasma-Surface Interactions II
Thursday 8:00am	PS2-ThM	Plasma Diagnostics I
Thursday 2:00pm	PS1-ThA	Plasma Diagnostics II
Thursday 2:00pm	PS2+BI-ThA	Plasmas in Bioscience
Thursday 5:30pm	PS-ThP	Plasma Science and Technology Poster Session
Friday 8:00am	PS-FrM	Plasma-Surface Interactions III