AVS 51st International Symposium
Click a session title to see the papers
| Start Time | Session Code | Session Title |
|---|---|---|
| Monday 8:20am | PS1-MoM | Low-k Dielectric Etching |
| Monday 8:20am | PS2-MoM | Silicon Etching |
| Monday 2:00pm | PS1-MoA | Plasma Surface Interactions in Etching |
| Monday 2:00pm | PS2-MoA | Emerging Plasma Applications |
| Monday 5:00pm | PS-MoP | Poster Session |
| Tuesday 8:20am | PS1-TuM | Dielectric Etching |
| Tuesday 8:20am | PS2-TuM | New Gate Conductor Etching |
| Tuesday 8:20am | DI+PS-TuM | High-k Dielectrics: Growth and Processing |
| Tuesday 1:20pm | PS+MS-TuA | 45nm Node with Panel Discussion |
| Tuesday 1:20pm | PS2-TuA | Plasma and Polymers |
| Tuesday 1:20pm | MN+MS+PS+TF-TuA | Nano/MEMS Manufacturing and Plasmas |
| Tuesday 4:00pm | PS-TuP | Poster Session |
| Wednesday 8:20am | PS1-WeM | Plasma in Nanoscale Applications |
| Wednesday 8:20am | PS2-WeM | Plasma Sources |
| Wednesday 2:00pm | PS-WeA | Plasma Diagnostics |
| Thursday 8:20am | PS-ThM | Atmospheric and Microdischarges |
| Thursday 2:00pm | PS-ThA | Plasma-Surface Interaction |
| Thursday 2:00pm | DI+PS-ThA | Oxides on Semiconductors |
| Friday 8:20am | PS+BI-FrM | Plasmas in Bioscience |
| Friday 8:20am | PS1+DI-FrM | High K and Difficult Materials Etch |