| AVS 51st International Symposium | |
| Plasma Science and Technology | Wednesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 8:40am | PS1-WeM2 Growth, Characterization and Application of Plasma-Assisted Nano-Coatings P.P. Joshi, R.V. Pulikollu, S. Higgins, S.M. Mukhopadhyay, Wright State University |
| 9:00am | PS1-WeM3 Invited Paper Plasmas Technologies in Microfluidics for Novel Bioanalytical Systems T. Ichiki, Toyo University, Japan |
| 9:40am | PS1-WeM5 Fabrication of 7nm High Aspect Ratio Nanocolumns by Low Energy Neutral Beam Etching using Ferritin Iron-Core Mask T. Baba, T. Kubota, Tohoku University, Japan, Y. Uraoka, T. Fuyuki, Nara Institute of Science and Technology, Japan, I. Yamashita, Matsushita Electric Industrial Co., Ltd., Japan, S. Samukawa, Tohoku University, Japan |
| 10:00am | PS1-WeM6 Deposition of Nanocomposite Layers for Ultralow Dielectric Applications G.R. Alcott, TNO-TPD, The Netherlands, M. Creatore, Eindhoven University of Technology, The Netherlands, J. Linden, TNO-TPD, The Netherlands, M.C.M. van de Sanden, Eindhoven University of Technology, The Netherlands |
| 10:20am | PS1-WeM7 Invited Paper Nano-Scale Pattern Transferring By Plasma Etching Y. Zhang, C. Black, K. Guarini, T.J. Dalton, IBM T. J. Watson Research Center |
| 11:00am | PS1-WeM9 Crucial Role of Side Wall Deposition during Synthesis of Spatially Separated Vertically Aligned Carbon Nanofibers by C-PECVD A.V. Melechko, University of Tennessee, Knoxville, D.K. Hensley, Oak Ridge National Laboratory, X. Yang, K.L. Klein, University of Tennessee, Knoxville, H.M. Meyer, D.H. Lowndes, Oak Ridge National Laboratory, M.L. Simpson, Oak Ridge National Laboratory, University of Tennessee |
| 11:20am | PS1-WeM10 Catalytic Plasma Enhanced Chemical Vapor Deposition of Ultrasharp Vertically Aligned Silicon Nanocones and Their Characterization K.L. Klein, A.V. Melechko, University of Tennessee/ORNL, P.D. Rack, University of Tennessee, D.K. Hensley, Oak Ridge National Lab, J.D. Fowlkes, University of Tennessee, H.M. Meyer III, L.F. Allard, D.H. Lowndes, Oak Ridge National Lab, M.L. Simpson, University of Tennessee/ORNL |
| 11:40am | PS1-WeM11 Gas-Phase Synthesis of Single-Walled Carbon Nanotubes by Hot-Filament-Assisted Plasma Chemical Vapor Deposition and Its Analysis by Mass Spectroscopy Y. Hayashi, Y. Morimoto, Y. Kogawara, S. Nishino, Kyoto Institute of Technology, Japan |