AVS 51st International Symposium | |
Plasma Science and Technology | Tuesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
1:20pm | PS2-TuA1 Invited Paper Plasmas, Polymers and Plasma-deposited Polymer-like Films: Plasma Diagnostic Studies for SiO@sub 2@-like Film Deposition M. Creatore, M.C.M. van de Sanden, Eindhoven University of Technology, The Netherlands |
2:00pm | PS2-TuA3 Deposition of SiOx Films from Organosilicone and Oxygen Plasma under Continuous and Pulsed Modes S.R. Kim, Chungju National University, Korea, South Korea |
2:20pm | PS2-TuA4 Electron Impact Reactions of DVS-BCB Monomer in He Plasma for Low-k Film Deposition K. KINOSHITA, M. SHIMOYAMA, A. NAKANO, J. KAWAHARA, N. KUNIMI, T. KIKKAWA, Mirai, Japan |
2:40pm | PS2-TuA5 Molecular Dynamics Study of Interactions Between Organic Polymer Surfaces and Hydrogen/Nitrogen Radical Beams H.Y. Yamada, Kyoto University, Japan, S.H. Hamaguchi, Osaka University, Japan |
3:00pm | PS2-TuA6 Computational Investigation of the Role of Polyatomic Ions in Plasma Polymer Deposition I. Jang, W.-D. Hsu, S.B. Sinnott, University of Florida |
3:20pm | PS2-TuA7 Study of the Selected Effect of Molecules Generated in N@sub 2@ and O@sub 2@ Plasma for the Surface Modification of HDPE, PVDF and PTFE. N. Vandencasteele, Universite Libre de Bruxelles, Belgium, A. Wagner, Ames National Laboratory, H. Fairbrother, Johns Hopkins University, F. Reniers, Universite Libre de Bruxelles, Belgium |
3:40pm | PS2-TuA8 Deposition of Plasma Polymer Coatings on Stainless Steel A. Mistry, F.R. Jones, University of Sheffield, UK, D.B. Hammond, T.H. English, Corus Plc. Rotherham, UK |