| AVS 51st International Symposium | |
| Plasma Science and Technology | Thursday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 2:00pm | PS-ThA1 A Comprehensive Study of Gas Phase and Plasma-Surface Interactions of Depositing Fluorocarbon Plasma Systems I.T. Martin, E.R. Fisher, Colorado State University |
| 2:20pm | PS-ThA2 Mechanisms of Etching in the Presence of Depositing Species: Molecular Dynamics Simulations of Silicon Etching in Fluorocarbon Plasmas J.J. Vegh, D. Humbird, D.B. Graves, University of California, Berkeley |
| 2:40pm | PS-ThA3 Deposition and Composition of Polymer Films in Fluorocarbon Plasmas: CW and Pulsed Systems@footnote 1@ K. Rajaraman, M.J. Kushner, University of Illinois at Urbana-Champaign |
| 3:00pm | PS-ThA4 Invited Paper Dangling Bond Creation and Annihilation during Plasma Processes Studied by In-situ ESR Technique S. Yamasaki, AIST, Japan, K. Ishikawa, Tohoku University, Japan |
| 3:40pm | PS-ThA6 NH@sub x@ Radical Densities and Plasma Chemistry in a Remote Ar-NH@sub 3@-SiH@sub 4@ Plasma for Silicon Nitride Deposition P.J. van den Oever, J.H. van Helden, R. Engeln, D.C. Schram, M.C.M. van de Sanden, W.M.M. Kessels, Eindhoven University of Technology, The Netherlands |
| 4:00pm | PS-ThA7 First-Principles Analysis of Precursor-Surface Interactions Relevant to Plasma Deposition of Silicon Thin Films T. Bakos, D. Maroudas, University of Massachusetts |
| 4:20pm | PS-ThA8 Uniformity Study in Large-Area Showerhead Reactors R. Sobbia, L. Sansonnens, Ecole Polytechnique Fédérale de Lausanne (EPFL), Switzerland, J. Bondkowski, UNAXIS France SA, France |
| 4:40pm | PS-ThA9 Validity of Binary Collision Theory in Ion-Surface Interactions at 50-500 eV M. Gordon, K.P. Giapis, California Institute of Technology |
| 5:00pm | PS-ThA10 Molecular Dynamics Simulation for Physical Sputtering and Deposition of Pt and Au Films K. Ito, Kyoto University, Japan, H. Yamada, National Institute of Advanced Industrial Science and Technology (AIST), Japan, S.H. Hamaguchi, Osaka University, Japan |