| AVS 51st International Symposium | |
| Plasma Science and Technology | Wednesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 8:20am | PS2-WeM1 Langmuir Probe Measurements of Change in Plasma Parameters with Change in Chamber Geometry in Electronegative Plasmas S.P. Sant, E.A. Joseph, B.S. Zhou, L.J. Overzet, M.J. Goeckner, University of Texas at Dallas |
| 8:40am | PS2-WeM2 Modeling of a Commercial Dual Frequency Magnetically Enhanced Capacitively Coupled Plasma Reactor with Rotating Static Magnetic Field T. Panagopoulos, Applied Materials, Inc., A.M. Paterson, J.P. Holland, Applied Materials Inc. |
| 9:00am | PS2-WeM3 Control of Uniformity in Multifrequency Capacitively Coupled Plasmas Considering Edge Effects@footnote 1@ J. Lu, M.J. Kushner, University of Illinois at Urbana-Champaign |
| 9:20am | PS2-WeM4 Potentials and Fields in a 300-mm Dual-Frequency Capacitively Coupled Plasma Reactor P.A. Miller, E.V. Barnat, G.A. Hebner, Sandia National Laboratories, A.M. Paterson, J.P. Holland, T. Lill, Applied Materials |
| 9:40am | PS2-WeM5 Invited Paper Time and Position Resolved Characterization of ICP and Double-ICP Sources P. Awakowicz, Ruhr-Universität Bochum, Germany |
| 10:20am | PS2-WeM7 Comparison of Fluorocarbon Gases and NF3 for Plasma Chamber Cleaning with Transformer-Coupled, Toroidal Source B. Bai, H.H. Sawin, Massachusetts Institute of Technology, L. Gary, M. Mocella, DuPont Electronic Gases |
| 10:40am | PS2-WeM8 Scaling of Low-pressure Ionized Metal PVD Reactors@footnote 1@ V. Vyas, M.J. Kushner, University of Illinois at Urbana-Champaign |
| 11:00am | PS2-WeM9 Production of Meter-scale High-density Microwave Plasmas for Giant Materials Processing H. Sugai, Y. Nojiri, T. Ishijima, E. Stamate, Nagoya University, Japan |
| 11:20am | PS2-WeM10 Extraction of a Directional Ion Beam with Controlled Energy Using a Pulsed Plasma L. Xu, V.M. Donnelly, D.J. Economou, University of Houston |
| 11:40am | PS2-WeM11 Particle-in-Cell Simulation of Ion Extraction Through a Grid S.K. Nam, V.M. Donnelly, D.J. Economou, University of Houston |