AVS 47th International Symposium
Click a session title to see the papers
| Start Time | Session Code | Session Title |
|---|---|---|
| Monday 8:20am | PS-MoM | Plasma-Surface Interactions I |
| Monday 2:00pm | PS1-MoA | Emerging Plasma Applications |
| Monday 2:00pm | PS2-MoA | Plasma Etching of Conductors |
| Tuesday 8:20am | PS-TuM | Modeling of Plasma Processes |
| Tuesday 2:00pm | PS2-TuA | Plasma Diagnostics I |
| Tuesday 2:00pm | IE-TuA | Green Manufacturing |
| Tuesday 5:30pm | PS-TuP | Poster Session |
| Wednesday 8:20am | PS+MS-WeM | Plasma-Induced Damage |
| Wednesday 8:20am | IE+PS+MS+SE-WeM | Environmentally Friendly Process Development |
| Wednesday 11:00am | PS-WeP | Poster Session |
| Wednesday 2:00pm | PS1+MS-WeA | Sensors and Control in Plasma Processing |
| Wednesday 2:00pm | PS2-WeA | Feature Evolution |
| Thursday 8:20am | PS1+TF+SE-ThM | Fundamentals of Plasma Enhanced Chemical Vapor Deposition |
| Thursday 8:20am | PS2-ThM | Plasma Diagnostics II |
| Thursday 2:00pm | PS1-ThA | Plasma-Surface Interactions II |
| Thursday 2:00pm | PS2-ThA | Dielectrics I |
| Friday 8:20am | PS-FrM | Dielectrics II |