| 2:00pm |
PS2-TuA1
Effect of Xenon Dilution on Fluorocarbon Plasma Chemistry and Electron Distribution Function
H. Sugai, T. Ishijima, M. Ikeda, Nagoya University, Japan |
| 2:20pm |
PS2-TuA2
Comprehensive Measurements of Neutral and Ion Number Densities, Neutral Temperature, and EEDF in a CF@sub 4@ ICP
H. Singh, J.W. Coburn, D.B. Graves, University of California at Berkeley |
| 2:40pm |
PS2-TuA3 Invited Paper
Planar Laser-Induced Fluorescence Investigation of Fluorocarbon Plasmas
K.L. Steffens, M.A. Sobolewski, National Institute of Standards and Technology |
| 3:20pm |
PS2-TuA5
Determination of Electron Temperature, Fluorine Concentration, and Gas Temperature in Fluorocarbon/Argon Plasmas using Optical Emission Spectroscopy
M. Schabel, V.M. Donnelly, A. Kornblit, W. Tai, F. Klemens, Lucent Technologies, Bell Laboratories |
| 3:40pm |
PS2-TuA6
Time-Resolved Measurements of Fluorocarbon Radical Concentrations during Pulsed Oxide Etching Plasmas
T.M. Bauer, X. Wu, J.L. Cecchi, University of New Mexico |
| 4:00pm |
PS2-TuA7
Development of an Instrument: Resonantly Enhanced Multiphoton Ionization of Radicals Detected Using Time of Flight Mass Spectrometry
W.C. Flory, K.L. Williams, E.R. Fisher, Colorado State University |
| 4:20pm |
PS2-TuA8
Temperature and Distance Dependencies of Fluorocarbon Species Desorbed from Polymer Deposited Metal Surface in C@sub 4@F@sub 8@ Inductively Coupled Plasma
H.-H. Doh, University of Tokyo, Japan, T. Ichiki, Toyo University, Japan, Y. Tezuka, Y. Horiike, University of Tokyo, Japan |
| 4:40pm |
PS2-TuA9
C@sub x@H@sub y@ Radical Measurements using Cavity Ring Down Spectroscopy in a Remote Ar/C@sub 2@H@sub 2@ Plasma
M.C.M. van de Sanden, K.Y. Letourneur, M.G.H. Boogaarts, D.C. Schram, Eindhoven University of Technology, The Netherlands |
| 5:00pm |
PS2-TuA10
Electron Energy Control in Large-Diameter Inductively Coupled Plasma for High Performance of Etching
T. Urayama, T. Tsurumi, Tokai University, Japan, Y. Horiike, The University of Tokyo, Japan, S. Fujii, ADTEC Co., Ltd., Japan, H. Shindo, Tokai University, Japan |