| AVS 47th International Symposium | |
| Plasma Science and Technology | Monday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 2:00pm | PS1-MoA1 Invited Paper A Surface-Micromachined Miniature Inductively Coupled Plasma Generator J.A. Hopwood, O. Minayeva, Y. Yin, Northeastern University |
| 2:40pm | PS1-MoA3 Physics of Hollow Cathode Magnetron (HCM) Plasma Source K.F. Lai, Novellus Systems, Inc. |
| 3:00pm | PS1-MoA4 Ion-Ion Plasma Formation and Negative Ion Extraction S.K. Kanakasabapathy, M.H. Khater, L.J. Overzet, University of Texas, Dallas |
| 3:20pm | PS1-MoA5 Large Area Plasma Processing System Based on Electron Beam Ionization D. Leonhardt, S.G. Walton, D.D. Blackwell, W.E. Amatucci, D.P. Murphy, R.F. Fernsler, R.A. Meger, Naval Research Laboratory |
| 3:40pm | PS1-MoA6 Invited Paper New Development of Plasma Technology for Biomaterial Engineering M. Kuzuya, Gifu Pharmaceutical University, Japan |
| 4:20pm | PS1-MoA8 Detection of Perfluorinated Compounds by Microplasma Optical Emission Spectroscopy D.D. Hsu, D.B. Graves, University of California, Berkeley |