AVS 55th International Symposium & Exhibition, Plasma Science and Technology Sessions

Plasma Science and Technology Sessions

Click a session title to see the papers

Start Time	Session Code	Session Title
Monday 8:20am	PS-MoM	Plasma Etching for Advanced Interconnects
Monday 2:00pm	PS-MoA	Invited Highlights on Plasma-Surface Interactions - Honoring the Distinguished Career of Herbert H. Sawin
Tuesday 8:00am	PS-TuM	Advanced Gate Etching
Tuesday 1:40pm	PS-TuA	Fundamentals of Plasma-Surface Interactions I
Tuesday 1:40pm	BO+PS+AS+BI+SS-TuA	Plasma-deposited Polymer and Organic Surfaces in Biological Applications
Tuesday 1:40pm	EN+EM+NS+PS-TuA	Photovoltaics
Tuesday 6:30pm	PS-TuP	Plasma Science Poster Session
Wednesday 8:00am	PS1-WeM	Plasma-Surface Interactions in Materials Processing I
Wednesday 8:00am	PS2-WeM	Plasma Sources
Wednesday 1:40pm	PS1-WeA	Fundamentals of Plasma-Surface Interactions II
Wednesday 1:40pm	PS2-WeA	Plasma Diagnostics, Sensors, and Control I
Wednesday 1:40pm	NM+PS+AS-WeA	Nanomanufacturing I: Plasma Processing and Materials
Thursday 8:00am	PS1-ThM	Atmospheric Plasma Processing and Micro Plasmas
Thursday 8:00am	PS2-ThM	Plasma Modeling
Thursday 8:00am	NM+EM+PS+NS+NC-ThM	Printable Lithography and Processing
Thursday 2:00pm	PS1-ThA	Plasma Diagnostics, Sensors, and Control II
Thursday 2:00pm	PS2-ThA	Plasma Deposition and Plasma Enhanced Atomic Layer Deposition and Etching
Thursday 6:00pm	PS-ThP	Plasma Science Poster Session
Friday 8:20am	PS1-FrM	Plasma-Surface Interactions in Materials Processing II
Friday 8:20am	PS2-FrM	Plasma Processing for 3-D Integration, Photonics, Optoelectronics, and Memory Devices
Friday 8:20am	SE+PS-FrM	Pulsed Plasmas in Surface Engineering