| Start Time |
Session Code |
Session Title |
| Monday 8:20am |
PS1+SE-MoM |
Atmospheric-Pressure Plasmas |
| Monday 8:20am |
PS2-MoM |
Plasma Modeling |
| Monday 8:20am |
AP+2D+EM+PS+TF-MoM |
Area Selective Deposition and Selective-Area Patterning |
| Monday 8:20am |
TF+EM+MI+MN+OX+PS-MoM |
Functional Thin Films: Ferroelectric, Multiferroics, and Magnetic Materials |
| Monday 1:40pm |
PS+AS+EM+SS+TF-MoA |
Plasma-Surface Interactions |
| Monday 1:40pm |
PS1-MoA |
Plasma-Liquid Interactions, Medicine, and Agriculture |
| Monday 1:40pm |
2D+AP+EM+MI+MN+NS+PS+TF-MoA |
Nanostructures including Heterostructures and Patterning of 2D Materials |
| Monday 1:40pm |
2D+AP+EM+MI+NS+PS+TF-MoA |
2D Materials Growth and Fabrication |
| Monday 1:40pm |
EM+PS+TF-MoA |
New Devices and Materials for Logic and Memory |
| Tuesday 8:00am |
PS+EM-TuM |
Advanced FEOL |
| Tuesday 8:00am |
PS-TuM |
Plasma Diagnostics and Sources I |
| Tuesday 8:00am |
EM+2D+AP+NS+PS-TuM |
New Devices and Materials for Electronics and Photonics |
| Tuesday 2:20pm |
PS+EM-TuA |
Advanced BEOL/Interconnect Etching and Advanced Memory and Patterning |
| Tuesday 2:20pm |
AP+EL+MS+PS+SS+TF-TuA |
Advancing Metrology and Characterization to enable Atomic Layer Processing |
| Tuesday 2:20pm |
TF+PS-TuA |
Epitaxial Thin Films |
| Tuesday 6:30pm |
PS-TuP |
Plasma Science and Technology Poster Session |
| Wednesday 8:00am |
PS+EM-WeM |
Plasma Processing of Materials for Energy |
| Wednesday 8:00am |
AP+BI+PS+TF-WeM |
Surface Reaction Analysis and Emerging Applications of Atomic Scale Processing |
| Wednesday 8:00am |
RA+AS+CA+PS+TF-WeM |
Reproducibility in Science and Engineering, Including Materials and Energy Systems |
| Wednesday 2:20pm |
PS-WeA |
Commemorating the Career of John Coburn (ALL INVITED SESSION) |
| Thursday 8:00am |
PS-ThM |
Plasma Diagnostics and Sources II |
| Thursday 8:00am |
AP+PS+TF-ThM |
Thermal Atomic Layer Etching |
| Thursday 8:00am |
SE+PS-ThM |
Plasma-assisted Surface Modification and Deposition Processes |
| Thursday 2:20pm |
PS+2D+EM+SS+TF-ThA |
Plasma-Enhanced Atomic Layer Etching |
| Thursday 2:20pm |
PS+SS-ThA |
Plasma Conversion and Enhanced Catalysis for Chemical Synthesis |
| Thursday 2:20pm |
2D+AS+BI+HC+MN+NS+PS+SS+TL-ThA |
Surface Chemistry, Functionalization, Bio, Energy and Sensor Applications |
| Thursday 2:20pm |
TF+AS+EL+PS+RA-ThA |
Characterization of Thin Film Processes and Properties |
| Friday 8:20am |
PS+2D+SE+TF-FrM |
Plasma Deposition and Plasma-Enhanced Atomic Layer Deposition |
| Friday 8:20am |
SS+HC+PS-FrM |
Planetary, Ambient, and Operando Environments |