| AVS 66th International Symposium & Exhibition | |
| Plasma Science and Technology Division | Tuesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 8:00am | PS-TuM1 Optimizing Power Delivery in a Pulsed Inductively Coupled Plasma Using Set-Point Impedance Match and Frequency Tuning Chenhui Qu, University of Michigan, J. Brandon, C. Smith, S.C. Shannon, North Carolina State University, D. Coumou, S. White, MKS Instruments, M.J. Kushner, University of Michigan |
| 8:20am | PS-TuM2 Compact Surface Wave Plasma Source G.A. Panici, David Ruzic, D. Qerimi, D.E. Barlaz, University of Illinois at Urbana-Champaign, B.E. Jurczyk, Starfire Industries LLC |
| 8:40am | PS-TuM3 Invited Paper Overview of Linear Plasma Sources as Applied to Ribbon ion and Plasma Beam Processing of Scanned Substrates Peter Kurunczi, Applied Materials, Varian Semiconductor Equipment |
| 9:20am | PS-TuM5 Online Diagnostics of Non-Thermal Plasma Nanoparticle-Laden Systems by Ion Mobility Spectrometry Xiaoshuang Chen, S. Ghosh, D. Buckley, University of Minnesota, Minneapolis, R.M. Sankaran, Case Western Reserve University, T. Seto, Kanazawa University, Japan, U.R. Kortshagen, C.J. Hogan, University of Minnesota, Minneapolis |
| 9:40am | PS-TuM6 Experiment-Model Comparisons in Capacitively Coupled Plasmas at Moderate Pressures for Argon, Helium and Nitrogen David J. Peterson, North Carolina State University, T. Koh, T.C. Chua, W. Tian, K. Bera, S. Rauf, P.A. Kraus, Applied Materials, Inc., S.C. Shannon, North Carolina State University |
| 11:00am | PS-TuM10 Optical and Mass Spectrometric Measurements of O2 and NF3 Dissociation in a Low Frequency, High Density, Remote Plasma Hanyang Li, Y. Zhou, V.M. Donnelly, University of Houston, J. Chiu, X. Chen, MKS Plasma & Reactive Gas Solutions |
| 11:20am | PS-TuM11 A Combined Experimental and Modeling Study of Reactive Vapor-nanoparticle-plasma Interactions in a Dusty Atmospheric-pressure Plasma Nabiel Abuyazid, Case Western Reserve University, X. Chen, University of Minnesota, Minneapolis, D. Mariotti, P. Maguire, University of Ulster, UK, C.J. Hogan, University of Minnesota, Minneapolis, R.M. Sankaran, Case Western Reserve University |