AVS 57th International Symposium & Exhibition
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Plasma Science and Technology Sessions
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Start Time
Session Code
Session Title
Monday 8:20am
PS-MoM
Advanced BEOL / Interconnect Etching I
Monday 8:20am
EN+PS-MoM
Plasmas for Photovoltaics & Energy Applications
Monday 8:20am
SE+PS-MoM
Atmospheric Pressure Plasmas
Monday 2:00pm
PS1-MoA
Advanced FEOL / Gate Etching I
Monday 2:00pm
PS2-MoA
Atmospheric Plasma Processing and Micro Plasmas
Monday 2:00pm
SE+PS-MoA
Pulsed Plasmas in Surface Engineering
Tuesday 8:00am
PS1-TuM
Advanced FEOL Etching II
Tuesday 8:00am
PS2-TuM
Plasma Diagnostics, Sensors and Control
Tuesday 2:00pm
PS1-TuA
Advanced BEOL/Interconnect Etching II
Tuesday 2:00pm
PS2-TuA
Plasma Sources
Tuesday 6:00pm
PS-TuP
Plasma Science and Technology Poster Session
Wednesday 8:00am
PS+MN-WeM
Plasma Processing for 3D Integration, TSV, and MEMS
Wednesday 8:00am
PS-WeM
Plasma Surface Interactions (Fundamentals & Applications) I
Wednesday 2:00pm
PS1-WeA
Plasma Surface Interactions (Fundamentals & Applications) II
Wednesday 2:00pm
PS2-WeA
Neutral Beam Processing
Thursday 8:00am
PS+TF-ThM
Plasma Deposition and Plasma Enhanced ALD
Thursday 8:00am
PS-ThM
Plasma Surface Interactions (Fundamentals & Applications) III
Thursday 2:00pm
PS1-ThA
Plasma Modeling
Thursday 2:00pm
PS2+BI-ThA
Plasmas for Medical and Biological Applications
Thursday 6:00pm
PS-ThP
Plasma Science and Technology Poster Session
Friday 8:20am
PS-FrM
Liquids and Multiphase Discharges
AVS 57th International Symposium & Exhibition