AVS 57th International Symposium & Exhibition
    Energy Frontiers Topical Conference Monday Sessions

Session EN+PS-MoM
Plasmas for Photovoltaics & Energy Applications

Monday, October 18, 2010, 8:20 am, Room Mesilla
Moderator: M. Funk, Tokyo Electron America Inc.,


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Click a paper to see the details. Presenters are shown in bold type.

8:20am EN+PS-MoM1
Combinatorial Plasma CVD of Si Thin Films with a Multihollow Discharge Plasma CVD Reactor
M. Shiratani, K. Koga, T. Matsunaga, Y. Kawashima, W. Nakamura, G. Uchida, N. Itagaki, Kyushu University, Japan
8:40am EN+PS-MoM2
Infrared Solar Cells Using Plasma-Processed Carbon Nanotubes
T. Kaneko, S. Kodama, Y. Li, R. Hatakeyama, Tohoku University, Japan
9:00am EN+PS-MoM3 Invited Paper
A Novel Method of Controlling Plasma Uniformity in a Large Area VHF Plasma Source for Solar Applications
T. Tanaka, J. Kudela, E. Hammond, C. Boitnott, Z. Chen, J.A. Kenney, S. Rauf, Applied Materials Inc.
9:40am EN+PS-MoM5
Novel Plasma Processing Routes of Si Nanocrystals for Photovoltaic Applications
İ. Doğan, N.J. Kramer, MA. Verheijen, Eindhoven University of Technology, Netherlands, T.H. van der Loop, University of Amsterdam, Netherlands, A.H.M. Smets, Eindhoven University of Technology, Netherlands, T. Gregorkiewicz, University of Amsterdam, Netherlands, M.C.M. van de Sanden, Eindhoven University of Technology, Netherlands
10:40am EN+PS-MoM8
Material Properties of Hydrogenated Nanocrystalline Silicon Thin Films by RF-PECVD using He-SiH4 Mixture
I.K. Kim, J.H. Lim, K.N. Kim, G.Y. Yeom, Sungkyunkwan University, Republic of Korea
11:00am EN+PS-MoM9
Surface Composition and Gas-Phase Passivation of Plasma-Synthesized Si Nanoparticles
B.N. Jariwala, Colorado School of Mines, N.J. Kramer, Eindhoven University of Technology, Netherlands, B.G. Lee, P. Stradins, National Renewable Energy Laboratory, M.C.M. van de Sanden, Eindhoven University of Technology, Netherlands, C.V. Ciobanu, S. Agarwal, Colorado School of Mines
11:20am EN+PS-MoM10
Effects of Hole-Array-Electrode on the Characteristics of Radio Frequency Capacitively Coupled Plasma Sources for uc-Si Thin Film PECVD
H.-J. Lee, S.-S. Wi, Pusan National University, Republic of Korea, D. Kim, D. Hwang, W.S. Chang, LG Electronics, Republic of Korea
11:40am EN+PS-MoM11
Arc Energy in Large Scale Magnetron Sputtering
D. Carter, H. Walde, Advanced Energy Industries, Inc.