| AVS 57th International Symposium & Exhibition | |
| Plasma Science and Technology | Tuesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 8:00am | PS2-TuM1 Wafer-level Plasma Parameters Measurements in a Multi-Frequency Capacitively Coupled Plasma Discharge L. Dorf, S. Rauf, J.A. Kenney, K. Bera, N. Misra, K. Collins, Applied Materials Inc. |
| 8:20am | PS2-TuM2 In-situ Measurement of High-Frequency Current and Voltage in Etching Chambers S. Kobayashi, H. Hanawa, K. Ramaswamy, S. Rauf, Applied Materials Inc. |
| 8:40am | PS2-TuM3 Invited Paper The Determination of Energy Fluxes in Plasma Surface Interaction H. Kersten, University of Kiel, Germany |
| 9:20am | PS2-TuM5 Noninvasive Electrical Monitoring of Ion Current, Ion Energy, Electron Temperature, and Electron Yield M.A. Sobolewski, National Institute of Standards and Technology |
| 9:40am | PS2-TuM6 Controllable Electron Beam for Optical Emission Studies in Real-Time Process Plasmas G. Padron-Wells, P.L.S. Thamban, University of Texas at Dallas, J. Hosch, Verity Instruments, M.J. Goeckner, University of Texas at Dallas |
| 10:40am | PS2-TuM9 A New Diagnostic Tool of Electron Energy Distribution Function in Capacitive Modes in High Frequency Plasmas H. Shindo, Y. Nakazaki, Tokai University, Japan |
| 11:00am | PS2-TuM10 Frequency Probe Measurements in Processing Plasmas D.R. Boris, NRL/NRC Postdoctoral Research Associate, S.G. Walton, Naval Research Laboratory, M. Baraket, NRL/NRC Postdoctoral Research Associate, E.H. Lock, R.F. Fernsler, Naval Research Laboratory |
| 11:20am | PS2-TuM11 Probe Geometry Induced Electron Energy Distribution Function (EEDF) Distortion A.E. El Saghir, E.M. Martin, S.S. Shannon, North Carolina State University |
| 11:40am | PS2-TuM12 How Fast do Ions Fall Out of a Two Ion Species Plasma? Experimental Test of a New Theory N. Hershkowitz, C.-S. Yip, University of Wisconsin-Madison, G. Severn, University of San Diego |