| AVS 57th International Symposium & Exhibition | |
| Plasma Science and Technology | Thursday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 8:40am | PS+TF-ThM3 Room Temperature PECVD Synthesis of Hybrid Organic-Inorganic Nanolaminates R. Patel, C.A. Wolden, Colorado School of Mines |
| 9:00am | PS+TF-ThM4 Role of PEALD System Plasma Source Operation on Substrate Ion Bombardment and the Impact on HfO2 and TiN Film Properties M.J. Sowa, G.M. Sundaram, E.W. Deguns, R. Bhatia, M.J. Dalberth, A. Bertuch, G. Liu, J.S. Becker, Cambridge NanoTech, Inc. |
| 9:20am | PS+TF-ThM5 HfTiSiON Film Growth by N2 Plasma Exposure to Hf-Ti Liquid Nano Particles on SiO2/Si T. Kitajima, T. Nakano, National Defense Academy, Japan, T.M. Makabe, Keio University, Japan |
| 11:00am | PS+TF-ThM10 Improving the Quality of PVD Cu Seed Layer for Interconnect Metallization A. Dulkin, E. Ko, L. Wu, I. Karim, K. Leeser, K.J. Park, Novellus Systems, Inc., L. Meng, D.N. Ruzic, University of Illinois at Urbana-Champaign |
| 11:20am | PS+TF-ThM11 Pulsed Plasma Polymerization of 2-Chloro-p-xylene I.C. Estrada-Raygoza, P.L.S. Thamban, G. Padron-Wells, L.J. Overzet, M.J. Goeckner, University of Texas at Dallas |
| 11:40am | PS+TF-ThM12 Morphological Variation of Plasma Polymerized TiOxCy Films as a Function of Oxygen Concentration during PECVD L. Sun, H. Jiang, General Dynamics Information Technology, J. Grant, University of Dayton Research Institute, P. Lloyd, UES, Inc., T. Bunning, R. Jakubiak, Air Force Research Laboratory |