| AVS 57th International Symposium & Exhibition | |
| Plasma Science and Technology | Wednesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 8:00am | PS-WeM1 On the Mechanism of Plasma Surface Interactions in Electron Beam-Generated Plasma in Nitrogen Environment E.H. Lock, S.G. Walton, R.F. Fernsler, Naval Research Laboratory |
| 8:20am | PS-WeM2 Breakthrough of Compatibility between Bowing-free Profile and Bottom CD in High Aspect Ratio Dielectric Etch Using DC Superimposed Capacitively-Coupled Plasma A. Nakagawa, H. Mochiki, M. Dojun, K. Yatsuda, S. Okamoto, Tokyo Electron AT Limited, Japan |
| 8:40am | PS-WeM3 High Resolution Cryogenic Silicon Etch Process Development for Nanoscale Trenches Y. Wu, Oxford Instruments, Lawrence Berkeley National Laboratory, D. Olynick, Lawrence Berkeley National Laboratory, A. Goodyear, Oxford Instruments, C. Peroz, Abeam Technologies, S. Dhuey, X. Liang, S. Cabrini, Lawrence Berkeley National Laboratory |
| 9:00am | PS-WeM4 Quantitative Analysis and Modeling of Dry Etch Induced Physical Damage in Si Surface Layer J.H. Yoon, W.S. Kim, J.W. Han, D.H. Kim, J.Y. Lee, K.S. Shin, C.J. Kang, Samsung Electronics, Republic of Korea |
| 9:20am | PS-WeM5 On the Role of CF in Fluorocarbon Plasmas: Gas-Phase Reactions and Surface Interactions M.F. Cuddy, E.R. Fisher, Colorado State University |
| 9:40am | PS-WeM6 "Designer" Ion Energy Distributions on Substrates Immersed in a Plasma P. Diomede, D.J. Economou, V.M. Donnelly, University of Houston |
| 10:40am | PS-WeM9 Invited Paper Modeling of Plasma-Induced Damage and Its Impacts on Parameter Variations in Advanced Electronic Devices K. Eriguchi, Kyoto University, Japan |
| 11:20am | PS-WeM11 Time Resolved Diagnostics of a Pulsed Dual-Source Inductively Coupled Plasma H. Shin, W. Zhu, X. Lin, V.M. Donnelly, D.J. Economou, University of Houston |
| 11:40am | PS-WeM12 Investigations on Physical Processes for Low Temperature Plasma Activated Wafer Bonding T. Plach, K.H. Hingerl, University of Linz, Austria, D.V. Dragoi, G.M. Mittendorfer, W.M. Wimplinger, EV Group, Austria |