AVS 45th International Symposium
Click a session title to see the papers
| Start Time | Session Code | Session Title |
|---|---|---|
| Monday 8:20am | PS-MoM | Feature Evolution |
| Monday 8:20am | MM+PS-MoM | MEMS Processing and Deep Si Etch Technology |
| Monday 2:00pm | PS1-MoA | Environmental Issues and Emerging Technologies |
| Monday 2:00pm | PS2-MoA | Diagnostics I |
| Monday 5:30pm | PS-MoP | Plasma Science and Technology Poster Session |
| Tuesday 8:20am | PS1-TuM | Pulsed Plasmas |
| Tuesday 8:20am | PS2-TuM | Oxide Etching |
| Tuesday 2:00pm | PS+MS-TuA | ULSI Technology |
| Tuesday 2:00pm | EM+PS+SE-TuA | Plasma Processing of Compound Semiconductors |
| Wednesday 8:20am | PS-WeM | Plasma Damage |
| Wednesday 2:00pm | PS-WeA | Plasma-Surface Interactions I |
| Thursday 8:20am | PS-ThM | Plasma Applications in Copper Metallization |
| Thursday 8:20am | EM+PS-ThM | Processing of High K Dielectrics for DRAMs |
| Thursday 2:00pm | PS-ThA | Diagnostics II |
| Thursday 5:30pm | PS-ThP | Plasma Science and Technology Division Poster Session |
| Friday 8:20am | PS-FrM | Plasma-Surface Interactions - II |