| AVS 45th International Symposium | |
| The Science of Micro-Electro-Mechanical Systems Topical Conference | Monday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 8:20am | MM+PS-MoM1 Invited Paper Overcoming Barriers to MEMS Prototyping and Production D.A. Koester, K.W. Markus, MCNC |
| 9:00am | MM+PS-MoM3 Invited Paper Materials, Process, and Integration Issues in SiC MEMS M. Mehregany, Case Western Reserve University |
| 9:40am | MM+PS-MoM5 Thermally-Actuated Micro-Beam for Large In-Plane Mechanical Deflections E.S. Kolesar, P.B. Allen, J.T. Howard, J.W. Wilken, Texas Christian University |
| 10:00am | MM+PS-MoM6 Development of a Micro EHD Pump Using Laser Micro-machining C.C. Wong, D. Chu, D.R. Adkins, Sandia National Laboratories |
| 10:20am | MM+PS-MoM7 Laminated Plastic Microfluidic Components for Biological and Chemical Systems P.M. Martin, D.W. Matson, W.D. Bennett, D.J. Hammerstrom, Battelle Pacific Northwest National Laboratory |
| 10:40am | MM+PS-MoM8 Deep Anisotropic Etching of Silicon S. Aachboun, P. Ranson, University of Orleans, CNRS, France |
| 11:00am | MM+PS-MoM9 Application of the Footing Effect in the Microfabrication of Self-Aligned, Free-Standing Structures A.A. Ayon, K. Ishihara, R. Braff, H. Sawin, M.A. Schmidt, Massachusetts Institute of Technology |
| 11:20am | MM+PS-MoM10 Test Structure Experiments and Modeling of Very Deep Dry Etching Processes for MEMS Applications S. Abdollahi-Alibeik, J.P. McVittie, K.C. Saraswat, Stanford University |
| 11:40am | MM+PS-MoM11 Pattern Shape Effects and Artefacts in Deep Silicon Etching J. Kiihamaki, S. Franssila, VTT Electronics, Finland |