AVS 59th Annual International Symposium and Exhibition
Click here to Download program book for this Topic
in Adobe Acrobat format
Plasma Science and Technology Sessions
Click a session title to see the papers
Start Time
Session Code
Session Title
Monday 8:20am
PS+EM-MoM
Atmospheric Plasma Processing and Micro Plasmas
Monday 8:20am
PS-MoM
Advanced FEOL/Gate Etching 1
Monday 8:20am
EL+TF+AS+EM+SS+PS+EN+NM-MoM
Spectroscopic Ellipsometry for Photovoltaics and Semiconductor Manufacturing
Monday 8:20am
GR+EM+NS+PS+SS+TF-MoM
Graphene Growth
Monday 2:00pm
PS+BI-MoA
Applications of (Multiphase) Atmospheric Plasmas (including Medicine and Biological Applications)
Monday 2:00pm
PS2-MoA
Plasma Modeling
Tuesday 8:00am
PS1-TuM
Plasma Diagnostics, Sensors and Control 1
Tuesday 8:00am
PS2-TuM
Advanced FEOL/Gate Etching 2
Tuesday 8:00am
SE+PS-TuM
Pulsed Plasmas in Surface Engineering
Tuesday 2:00pm
PS1-TuA
Plasma Deposition and Plasma Enhanced ALD
Tuesday 2:00pm
PS2-TuA
Plasma Surface Interaction during Plasma Etching
Tuesday 2:00pm
SE+PS-TuA
Atmospheric Pressure Plasmas
Wednesday 8:00am
PS+TC-WeM
Atmospheric Plasma Processing for PV, Flexible Electronics (incl. R2R)
Wednesday 8:00am
PS-WeM
Advanced BEOL/Interconnect Etching
Wednesday 8:00am
EN+PS-WeM
Plasmas for Photovoltaics and Energy Applications
Wednesday 8:00am
GR+AS+BI+PS+SS-WeM
Graphene Surface Chemistry, Functionalization, Biological and Sensor Applications
Wednesday 2:00pm
PS1-WeA
Plasma Diagnostics, Sensors and Control 2
Wednesday 2:00pm
PS2-WeA
Plasma Surface Interactions during PECVD and Plasma Surface Modification
Thursday 8:00am
PS1-ThM
Plasma Processing for Disruptive Technologies (NVM, TSV, etc.)
Thursday 8:00am
PS2-ThM
Low Damage Processing
Thursday 2:00pm
PS-ThA
Plasma Sources
Thursday 6:00pm
PS-ThP
Plasma Science and Technology Poster Session
AVS 59th Annual International Symposium and Exhibition