| AVS 59th Annual International Symposium and Exhibition | |
| Plasma Science and Technology | Tuesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 2:00pm | PS1-TuA1 Invited Paper Looking Down the Rabbit Hole: Impact of Porosity in Plasma-deposited Inorganic Layers on Their Moisture Permeation Barrier Performance M. Creatore, Eindhoven University of Technology, The Netherlands |
| 2:40pm | PS1-TuA3 Dual Etching and Deposition Mechanism of a Microwave Alcohol Plasma on Commercial Polymers for the Enhancement of Adhesion C.J. Hall, P.J. Murphy, H.J. Griesser, University of South Australia |
| 3:00pm | PS1-TuA4 The Roles of Ions and Neutrals in Growth Mechanisms of Plasma Polymer Films A. Michelmore, University of South Australia |
| 4:00pm | PS1-TuA7 Defect Analysis and Mechanical Performance of Optoelectronic Thin Films Deposited on Flexible Substrates R. Patel, C.A. Wolden, Colorado School of Mines |
| 4:20pm | PS1-TuA8 Plasma Polymerization of Ethyl Lactate S. Ligot, University of Mons, Belgium, F. Renaux, Materia Nova Research Center, Belgium, L. Denis, University of Mons, Belgium, D. Cossement, Materia Nova Research Center, Belgium, P. Dubois, R. Snyders, University of Mons, Belgium |
| 4:40pm | PS1-TuA9 Functional Carbon Contained Film Formation using Neutral-Beam-Enhanced Chemical-Vapor-Deposition by Microwave Plasma Y. Kikuchi, Tohoku University and Tokyo Electron, Japan, A. Wada, S. Samukawa, Tohoku University, Japan |
| 5:00pm | PS1-TuA10 Nano-crystalline Silicon Deposition using a Layer-by-layer Technique Z. Chen, M.N. Iliev, J.A. Mucha, University of Houston, Y.K. Pu, Tsinghua University, China, D.J. Economou, V.M. Donnelly, University of Houston |
| 5:20pm | PS1-TuA11 Role of PEALD Reactor Wall Conditions on Radical and Ion Substrate Fluxes M.J. Sowa, M.J. Sershen, G. Sundaram, J.S. Becker, Cambridge NanoTech, Inc. |
| 5:40pm | PS1-TuA12 Tuning Material Properties in ALD ZnO Films: In Situ Plasma Treatments and Doping M.A. Thomas, Stetson University, J.B. Cui, University of Arkansas at Little Rock |