AVS 59th Annual International Symposium and Exhibition
    Advanced Surface Engineering Tuesday Sessions

Session SE+PS-TuM
Pulsed Plasmas in Surface Engineering

Tuesday, October 30, 2012, 8:00 am, Room 22
Moderator: C. Mitterer, University of Leoben, Austria


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  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

8:00am SE+PS-TuM1 Invited Paper
Strong Localization of Ionization in High Power Impulse Magnetron Sputtering in Reactive and Non-Reactive Gas Environments
A. Anders, Lawrence Berkeley National Laboratory
8:40am SE+PS-TuM3
The Magnetic Field Configuration’s Effect on Plasma Parameters in High-Power Pulsed Magnetron Sputtering
H. Yu, L. Meng, P. Raman, T.S. Cho, D.N. Ruzic, University of Illinois at Urbana Champaign
9:00am SE+PS-TuM4
Plasma Generation and Transport in High-Power Pulsed Magnetron Sputtering
L. Meng, H. Yu, T.S. Cho, D.N. Ruzic, University of Illinois at Urbana Champaign
9:20am SE+PS-TuM5
Metallic Film Modification through the Use of Non-standard HiPIMS Waveforms
P.M. Barker, E. Lewin, J. Patscheider, EMPA, Switzerland
10:40am SE+PS-TuM9
Reactive Modulated Pulse Power Magnetron Sputtering of Molybdenum Oxides: Optical Behavior as a Function of Process Parameters
N.R. Murphy, Air Force Research Laboratory, L. Sun, General Dynamics Information Technology, J.T. Grant, University of Dayton Research Institute, J.G. Jones, R. Jakubiak, Air Force Research Laboratory
11:00am SE+PS-TuM10
Cathodic Arc Plasma of AlCr Composite Cathodes in Inert and Reactive Atmospheres
R. Franz, J. Wallig, Lawrence Berkeley National Laboratory, P. Polcik, PLANSEE Composite Materials GmbH, Germany, A. Anders, Lawrence Berkeley National Laboratory