| AVS 59th Annual International Symposium and Exhibition | |
| Plasma Science and Technology | Wednesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 2:00pm | PS2-WeA1 Invited Paper Surface Modifications Induced by Extreme Fluxes of Low-Energy Ions G. De Temmerman, K. Bystrov, FOM Institute DIFFER, Netherlands, M.J. Baldwin, R.P. Doerner, University of California San Diego, L. Marot, University of Basel, Switzerland, H.Y. Xu, Tsinghua University, China, M.C.M. van de Sanden, FOM Institute DIFFER, Netherlands |
| 2:40pm | PS2-WeA3 Investigation of Plasma-Surface Interactions Between Hydrogen Radical and Chemically Amplified Photoresist A. Malinowski, Institute of Electron Technology, Poland, M. Sekine, M. Hori, K. Ishikawa, H. Kondo, T. Takeuchi, T. Suzuki, Nagoya University, Japan, A. Jakubowski, L. Lukasiak, Warsaw University of Technology, Poland, D. Tomaszewski, Institute of Electron Technology, Poland |
| 3:00pm | PS2-WeA4 Kinetic Theory of the Sheath near Electron Emitting Surfaces J.P. Sheehan, University of Wisconsin Madison, I.D. Kaganovich, Princeton Plasma Physics Laboratory, N. Hershkowitz, University of Wisconsin Madison, Y. Raitses, Princeton Plasma Physics Laboratory |
| 4:00pm | PS2-WeA7 Probing CF and CF2 Surface Reactivities in Inductively-Coupled Fluorocarbon Plasmas M.F. Cuddy, E.R. Fisher, Colorado State University |
| 4:20pm | PS2-WeA8 Effects of Ar Ion Bombardment on Protection of Organosilicate Glass from O2 Plasma Damage H.Ur. Kazi, S. Gaddam, J.A. Kelber, University of North Texas |
| 4:40pm | PS2-WeA9 Ion-Surface Interaction during Microcrystalline Silicon Thin Film Growth J. Palmans, A.C. Bronneberg, X. Kang, M.C.M. van de Sanden, W.M.M. Kessels, M. Creatore, Eindhoven University of Technology, the Netherlands |
| 5:00pm | PS2-WeA10 Time Resolved Characterization of Pulsed ICP CH4 – H2 Based Plasmas S. Jacq, L. Le Brizoual, C. Cardinaud, A. Granier, University of Nantes - CNRS, France |
| 5:20pm | PS2-WeA11 Plasma-Surface Interactions, Erosion, and Impact on Plasma Distribution Functions N. Fox-Lyon, University of Maryland, College Park, D.B. Graves, University of California Berkeley, S.Y. Moon, V.M. Donnelly, D.J. Economou, University of Houston, G.S. Oehrlein, University of Maryland, College Park |
| 5:40pm | PS2-WeA12 MD Simulations of Hydrogen Plasma Interaction with Graphene Surfaces E. Despiau-Pujo, A. Davydova, G. Cunge, CNRS/UJF-Grenoble1/CEA LTM, France, L. Magaud, CNRS/UJF Institut Neel, France, D.B. Graves, University of California Berkeley |