AVS 58th Annual International Symposium and Exhibition, Plasma Science and Technology Division Sessions

AVS 58th Annual International Symposium and Exhibition

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Plasma Science and Technology Division Sessions

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Start Time	Session Code	Session Title
Monday 8:20am	PS-MoM	Advanced FEOL / Gate Etching I
Monday 8:20am	EN+PS-MoM	Plasmas for Photovoltaics & Energy Applications
Monday 2:00pm	PS+BI-MoA	Multiphase (Liquid, Solid, Gas) and Biological Related Plasmas
Monday 2:00pm	PS+SE-MoA	Advanced FEOL / Gate Etching II
Monday 2:00pm	MB+BI+PS-MoA	Marine Antifouling Coatings
Tuesday 8:00am	PS+MN+TF-TuM	Plasma Processing for Disruptive Technologies
Tuesday 8:00am	PS-TuM	Advanced BEOL / Interconnect Etching I
Tuesday 2:00pm	PS1-TuA	Advanced BEOL / Interconnect Etching II
Tuesday 2:00pm	PS2-TuA	Plasma Diagnostics, Sensors and Control I
Wednesday 8:00am	PS+SE-WeM	Atmospheric Plasma Processing and Micro Plasmas
Wednesday 8:00am	PS+SS-WeM	Plasma Surface Interactions (Fundamentals & Applications) I
Wednesday 2:00pm	PS+EM-WeA	Low-K Materials & Integration
Wednesday 2:00pm	PS-WeA	Plasma Sources
Wednesday 2:00pm	SE+PS-WeA	Atmospheric Pressure Plasmas
Thursday 8:00am	PS+TF-ThM	Plasma Deposition and Plasma Enhanced ALD
Thursday 8:00am	PS-ThM	Neutral Beam and Low Damage Processing
Thursday 8:00am	EL+AS+EM+MS+PS+TF-ThM	Spectroscopic Ellipsometry of Biological Materials and Organic Films
Thursday 8:00am	GR+NS+PS+SS-ThM	Graphene: Surface Chemistry, Functionalization, Plasma Processing and Sensor Applications
Thursday 2:00pm	PS+SS-ThA	Plasma Surface Interactions (Fundamentals & Applications) II
Thursday 2:00pm	PS-ThA	Plasma Diagnostics, Sensors and Control II
Thursday 2:00pm	EL+AS+EM+MS+PS+TF-ThA	Spectroscopic Ellipsometry for Photovoltaics, Metals and Oxide Thin Films
Thursday 2:00pm	SE+PS-ThA	Pulsed Plasmas in Surface Engineering
Thursday 6:00pm	PS-ThP	Plasma Science and Technology Poster Session
Friday 8:20am	PS-FrM	Plasma Modeling
Friday 8:20am	EL+AS+EM+MS+PS+TF-FrM	Spectroscopic Ellipsometry: Future Directions and New Techniques