AVS 58th Annual International Symposium and Exhibition
    Plasma Science and Technology Division Thursday Sessions

Session PS+SS-ThA
Plasma Surface Interactions (Fundamentals & Applications) II

Thursday, November 3, 2011, 2:00 pm, Room 202
Moderator: Ajay Kumar, Case Western Reserve University


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  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

2:00pm PS+SS-ThA1 Invited Paper
Plasma Prize Lecture - The Role of Atomic Hydrogen on Plasma Synthesis of Carbon Nanotubes
Eray Aydil, University of Minnesota
2:40pm PS+SS-ThA3
CF and CF2 Contributions to Plasma-Enhanced Chemical Vapor Deposition of Fluorocarbon Films in CxFy Systems
Michael Cuddy, E.R. Fisher, Colorado State University
3:00pm PS+SS-ThA4
Polymer Surface Modification: Real-time In Situ Electron Spin Resonance Study for Plasma Processes
Kenji Ishikawa, N. Sumi, Nagoya University, Japan, A. Kono, H. Horibe, Kanazawa Institute of Technology, Japan, K. Takeda, H. Kondo, M. Sekine, M. Hori, Nagoya University, Japan
3:40pm PS+SS-ThA6
Control of Hydrocarbon Surface Density during H2/D2/Ar Low Temperature Plasma Interaction
Nick Fox-Lyon, G.S. Oehrlein, University of Maryland, College Park, N. Ning, D.B. Graves, University of California, Berkeley
4:00pm PS+SS-ThA7
Atomic Force Microscopy Determination of the Elastic Modulus of Nanometer Thick, Ultra-Stiff Modified Layers after Plasma Etching of a Polymer Film
Tsung-Cheng Lin, University of Maryland, College Park, H.C. Kan, National Chung Cheng University, Taiwan, Republic of China, R.L. Bruce, G.S. Oehrlein, R.J. Phaneuf, University of Maryland, College Park
4:20pm PS+SS-ThA8
Polymer Hardening Technique for Enhancement in Etch Selectivity/Durability Using DC Superimposed Capacitively-Coupled Plasma
Shin Okamoto, A. Nakagawa, F. Inoue, H. Oka, Tokyo Electron Miyagi Ltd., Japan, H. Mochiki, K. Yatsuda, Tokyo Electron Ltd., Japan
4:40pm PS+SS-ThA9
H2O Plasma Surface Modification of Track-Etched Polycarbonate Membranes Leading to Polar Surface Functionalization and Improved Wettability
Brendan Tompkins, J.M. Dennison, E.R. Fisher, Colorado State University
5:00pm PS+SS-ThA10
Plasma Printing: A New Inline Technology for Polymers Surface Modification
E.A.D. Carbone, M.W.G.M. Verhoeven, Eindhoven University of Technology, Netherlands, Wouter Brok, A. Stevens, Innophysics B.V., Netherlands, J.J.A.M. van der Mullen, Eindhoven University of Technology, Netherlands
5:20pm PS+SS-ThA11
Design of a Plasma Cleaning Unit to Clean Backside Contamination on Substrates
Freek Molkenboer, N.B. Koster, A.J. De Jong, J.C.J. van der Donck, A.M.C.P. de Jong, O. Kievit, TNO, Netherlands