AVS 58th Annual International Symposium and Exhibition
    Advanced Surface Engineering Division Thursday Sessions

Session SE+PS-ThA
Pulsed Plasmas in Surface Engineering

Thursday, November 3, 2011, 2:00 pm, Room 104
Moderator: Joerg Patscheider, EMPA, Switzerland


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  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

2:00pm SE+PS-ThA1
High-Power Impulse Magnetron Sputtering of WO3 - Influence of the Pulse Parameters on the Discharge
Axel Hemberg, F. Renaux, J.P. Dauchot, Materia Nova, Belgium, R. Snyders, S. Konstantinidis, UMons, Belgium
2:20pm SE+PS-ThA2
A Versatile Magnetized Pulsed Cascaded Arc Source for Surface Modifications and Efficient Material Deposition
Gregory De Temmerman, J.J. Zielinski, FOM Institute for Plasma Physics Rijnhuizen, Netherlands, L. Marot, D. Mathys, University of Basel, Switzerland, W. Melissen, FOM Institute for Plasma Physics Rijnhuizen, Netherlands, M.C.M. van de Sanden, FOM-Instituut for Plasma Physics Rijnhuizen & Eindhoven University of Technology, Netherlands
2:40pm SE+PS-ThA3 Invited Paper
Pulsed Magnetron Sputtering Systems for Reactive Deposition of Oxide and Nitride Films
Jaroslav Vlcek, J. Rezek, P. Steidl, University of West Bohemia, Czech Republic
3:40pm SE+PS-ThA6
Structure Evolution and Wear Mechanism in TiAlCN/VCN Nanoscale Multilayer Coatings Deposited by Reactive High Power Impulse Magnetron Sputtering Technology
Papken Hovsepian, A.P. Ehiasarian, G.K. Kamath, Sheffield Hallam University, UK, R. Haasch, I. Petrov, University of Illinois at Urbana Champaign
4:00pm SE+PS-ThA7
Plasma Study and Interconnect Metallization using a Modulated Pulse Power (MPP) Hollow Cathode Magnetron
Liang Meng, H. Yu, T.S. Cho, S. Jung, D.N. Ruzic, University of Illinois at Urbana Champaign
4:20pm SE+PS-ThA8
Structural and Optical Properties of Ultra-Thin Silver Films Deposited via High Power Impulse Magnetron Sputtering (HiPIMS) on Various Adhesion Layers
Rachel Jakubiak, Air Force Research Laboratory, L. Sun, General Dynamics Information Technology, N. Murphy, Air Force Research Laboratory, A. Waite, Universal Technology Corporation, J. Jones, Air Force Research Laboratory
4:40pm SE+PS-ThA9
Inductively Coupled Impulse Sputtering (ICIS): A Novel Technique for Ionised PVD
Arutiun Ehiasarian, D. Loch, Sheffield Hallam University, UK