AVS 50th International Symposium
Click a session title to see the papers
| Start Time | Session Code | Session Title |
|---|---|---|
| Monday 8:20am | PS-MoM | Critical Dimension Etching |
| Monday 2:00pm | PS+MM-MoA | MEMS Etching |
| Monday 2:00pm | PS-MoA | Plasma Sources |
| Tuesday 8:20am | PS+TF-TuM | Plasma Enchanced Chemical Vapor Deposition |
| Tuesday 8:20am | PS-TuM | Plasma Diagnostics: Processing |
| Tuesday 2:00pm | PS-TuA | Dielectric Etch |
| Tuesday 5:30pm | PS-TuP | Poster Session |
| Wednesday 8:20am | PS1-WeM | Plasma Processing of Nanostructures and Nanomaterials |
| Wednesday 8:20am | PS2-WeM | Etching Difficult Materials |
| Wednesday 11:00am | PS-WeP | Poster Session |
| Wednesday 2:00pm | PS1-WeA | Mechanisms in Plasma-Surface Interactions |
| Wednesday 2:00pm | PS2-WeA | Atmospheric Plasmas & Micro Discharges |
| Thursday 8:20am | PS1-ThM | Plasma-Surface Interactions: Deposition |
| Thursday 8:20am | PS2-ThM | Low k Dielectric Etch |
| Thursday 2:00pm | PS-ThA | Plasma Diagnostics: Mechanisms |
| Friday 8:20am | PS-FrM | Plasma-Surface Interactions: Etching |
| Friday 8:20am | BI+PS-FrM | Plasma Methods for Bio-interfaces |