| AVS 50th International Symposium | |
| Plasma Science and Technology | Wednesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 2:00pm | PS1-WeA1 Invited Paper PECVD of Thin Films: The Study of the Plasma-surface Interaction by Means of In Situ Plasma and Film Diagnostics M.C.M. van de Sanden, Eindhoven University of Technology, The Netherlands |
| 2:40pm | PS1-WeA3 Plasma Nitriding and Reactive Deposition in Electron Beam Generated Plasmas* C. Muratore, D. Leonhardt, S.G. Walton, D.D. Blackwell, R.F. Fernsler, R.A. Meger, Naval Research Laboratory |
| 3:00pm | PS1-WeA4 Angular Dependence of SiO@sub 2@, Si and Si@sub 3@N@sub 4@ Etch Yield in Fluorocarbon Gas Chemistries by using Plasma Beam K. Kurihara, A. Egami, M. Nakamura, ASET, Japan |
| 3:20pm | PS1-WeA5 Reduction Mechanism of VUV Radiation Damages in Pulse-Time-Modulated Plasma Processes Y. Ishikawa, M. Okigawa, Tohoku University, Japan, S. Yamasaki, National institute of Advanced Industrial Science and Technology, Japan, S. Samukawa, Tohoku University, Japan |
| 3:40pm | PS1-WeA6 IRIS Investigations of Gas Phase Species in Fluorocarbon Plasmas I.T. Martin, E.R. Fisher, Colorado State University |
| 4:00pm | PS1-WeA7 Fluorocarbon-based Plasma Etching: The Role of the Energy Distribution of Bombarding Ions R. Silapunt, S. Williams, A.E. Wendt, University of Wisconsin, Madison, K.H.R. Kirmse, L. Losey, Texas Instruments |
| 4:20pm | PS1-WeA8 Investigating the Fundamental Mechanism of Surface Smoothening of Plasma-Deposited Amorphous Silicon Thin Films through Atomistic Simulations S. Sriraman, S. Agarwal, E.S. Aydil, University of California, Santa Barbara, D. Maroudas, University of Massachusetts, Amherst |
| 4:40pm | PS1-WeA9 Study of SiO@sub 2@ Plasma Etching with Off-normal Mass-analyzed CF@sub x@@super +@ Ion Beam Irradiation K. Yanai, K. Karahashi, K. Ishikawa, M. Nakamura, Association of Super-Advanced Electronics Technologies, Japan |
| 5:00pm | PS1-WeA10 Reactive Surface Coefficients for Radicals in a Vacuum Beam System Y. Kimura, J. Coburn, D. Fraser, H. Winters, D.B. Graves, University of California, Berkeley |