| AVS 50th International Symposium | |
| Plasma Science and Technology | Thursday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 2:00pm | PS-ThA1 In-Situ Monitoring of Unstable Neutral Molecules using Ion Attachment Mass Spectrometer Y. Shiokawa, M. Nakamura, Y. Hirano, Y. Taneda, T. Fujii, Anelva Corporation, Japan |
| 2:20pm | PS-ThA2 Discharge Frequency Dependence of Plasma Parameters in Parallel-plate-electrode VHF Plasmas Y. Ichikawa, Fuji Electric Co. Ltd., Japan, T. Sasaki, Fuji Electric CRD, Japan, S. Matsumura, Musashi Institute of Technology, Japan |
| 2:40pm | PS-ThA3 Invited Paper Model-based RF Plasma Monitoring under Industrial Conditions M. Klick, ASI Advanced Semiconductor Instruments, Germany |
| 3:20pm | PS-ThA5 Study of Pulsed Plasma Doping System by Time-resolved Ion Mass-energy Spectrometry L. Godet, B.-W. Koo, VSEA, France, G. Cartry, C. Cardinaud, Institut des Materiaux de Nantes, France, Z. Fang, VSEA, France, A. Grouillet, D. Lenoble, STMicroelectronics, France |
| 3:40pm | PS-ThA6 Gas-Phase Diagnostics and Mechanisms of Energy Transfer in O@sub 2@/NH@sub 3@ Plasmas K.R. Kull, D.S. Wavhal, E.R. Fisher, Colorado State University |
| 4:00pm | PS-ThA7 The Study of Ion Drift Velocities and Instabilities in Presheaths in Two Ion Species Plasmas X Wang, E. Ko, N. Hershkowitz, University of Wisconsin, Madison |
| 4:20pm | PS-ThA8 Ion Collection by a Mach Probe in Flowing Unmagnetized Plasma E. Ko, X Wang, N. Hershkowitz, University of Wisconsin, Madison |
| 4:40pm | PS-ThA9 Novel Plasma Monitoring Scheme by Surface Wave Probe H. Sugai, H. Kawai, Nagoya University, Japan, K. Nakamura, Chubu University, Japan |
| 5:00pm | PS-ThA10 Measurement of Absolute Radical and Metastable Species Densities in O@sub 2@ and N@sub 2@ Plasmas using Modulated Beam Appearance Ionization Mass Spectrometry S. Agarwal, University of California, Santa Barbara, G.W.W. Quax, B. Hoex, M.C.M. van de Sanden, Eindhoven University of Technology, The Netherlands, D. Madoudas, University of Massachusetts, Amherst, E.S. Aydil, University of California, Santa Barbara |