IUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference on Solid Surfaces (ICSS-11)

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Plasma Science Sessions

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Start Time Session Code Session Title
Monday 9:40am PS1+MM-MoM Science & Technology of Microplasmas and MEMS Processing
Monday 9:40am PS2-MoM Diagnostics I
Monday 9:40am SE-MoM Nanocomposites, Multilayers, & Nanostructured Materials
Monday 2:00pm PS1-MoA Plasma-Surface Interactions I
Monday 2:00pm PS2-MoA Plasma Modification of Organics
Monday 5:30pm PS-MoP Plasma Diagnostics and Plasma-Surface Interactions Poster Session
Tuesday 8:20am PS1-TuM Diagnostics II
Tuesday 8:20am PS2-TuM Emerging Applications of Plasmas
Tuesday 2:00pm PS1-TuA Dielectric Etch I
Tuesday 2:00pm PS2+TF+SE-TuA PECVD/IPVD
Tuesday 5:30pm PS-TuP Plasma Deposition, Modeling, and Emerging Applications Poster Session
Wednesday 8:20am PS1-WeM Dielectric Etch II
Wednesday 8:20am PS2-WeM Modeling
Wednesday 2:00pm PS-WeA Plasma Surface Interactions II
Thursday 8:20am PS+MS-ThM Conductor Etch and Damage
Thursday 2:00pm PS-ThA Feature Profile Evolution
Thursday 5:30pm PS-ThP Plasma Etching Poster Session
Friday 8:20am PS-FrM Diagnostics III

IUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference on Solid Surfaces (ICSS-11)