| IUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference on Solid Surfaces (ICSS-11) | |
| Plasma Science | Tuesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 8:20am | PS1-TuM1 Radical Concentrations and Temperatures in a Dual-Frequency Capacitive Reactor Determined By Broad-Band UV-Visible Absorption Spectroscopy J. Luque, E.A. Hudson, Lam Research, J.P. Booth, Ecole Polytechnique, France |
| 8:40am | PS1-TuM2 CF@sub x@ Kinetics, Gas Temperatures and Instabilities in a CF@sub 4@ Inductively-coupled Discharge J.P. Booth, H. Abada, P. Chabert, Ecole Polytechnique, France, G. Cunge, CNRS/LETI, France |
| 9:00am | PS1-TuM3 Time-Resolved CF@sub 2@ Rotational Temperature Measurements in Inductively-Coupled Pulsed Plasmas X. Wu, T.M. Bauer, J.L. Cecchi, University of New Mexico |
| 9:20am | PS1-TuM4 Measurements of H atom and CF@sub x@ Radical Densities in High-density CHF@sub 3@ Plasmas by Laser-induced Fluorescence K. Sasaki, M. Okamoto, K. Kadota, Nagoya University, Japan |
| 10:20am | PS1-TuM7 c-C@sub 4@F@sub 8@/Ar Inductively Coupled Plasma Characterization M.T. Radtke, J.W. Coburn, D.B. Graves, University of California, Berkeley |
| 10:40am | PS1-TuM8 Use and Limitations of In-situ FTIR Spectroscopy for Fluorocarbon Plasma Analysis B.A. Cruden, M.V.V.S. Rao, Eloret Corp., NASA Ames Research Center, S.P. Sharma, M. Meyyappan, NASA Ames Research Center |
| 11:00am | PS1-TuM9 Measurements and Models of Ion Energy Distributions in High-Density, Radio-Frequency-Biased CF@sub 4@/Ar Discharges M.A. Sobolewski, Y. Wang, A.N. Goyette, National Institute of Standards and Technology |
| 11:20am | PS1-TuM10 Submillimeter Absorption Spectroscopy of an Inductively Coupled Plasma E.C. Benck, G. Golubiatnikov, G. Fraser, National Institute of Standards and Technology |