AVS 47th International Symposium


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Manufacturing Science and Technology Sessions

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Start Time Session Code Session Title
Monday 8:20am MS-MoM Metrology for IC Manufacturing
Monday 2:00pm MS-MoA Challenges in Semiconductor Manufacturing for the First Decade of the 21st Century
Tuesday 2:00pm IE-TuA Green Manufacturing
Wednesday 8:20am DI+EL+MS-WeM Low K Dielectrics
Wednesday 8:20am IE+PS+MS+SE-WeM Environmentally Friendly Process Development
Wednesday 8:20am PS+MS-WeM Plasma-Induced Damage
Wednesday 2:00pm MS-WeA Process Integration (Cu/Low-k/300mm)
Wednesday 2:00pm DI+EL+MS-WeA Alternate Gate Dielectrics
Wednesday 2:00pm PS1+MS-WeA Sensors and Control in Plasma Processing
Thursday 8:20am MS-ThM Advanced Modeling and Control for IC Manufacturing
Thursday 8:20am DI+EL+MS-ThM Ultrathin Dielectrics and Interfaces
Thursday 2:00pm MS-ThA Advanced Modeling for IC Manufacturing
Thursday 2:00pm DI+EL+MS-ThA High K Dielectrics: Perovskites
Friday 8:20am MS-FrM Langmuir Award/Ultra Clean Society and Contamination Free Manufacturing

AVS 47th International Symposium