AVS 47th International Symposium
Click a session title to see the papers
Start Time | Session Code | Session Title |
---|---|---|
Monday 8:20am | MS-MoM | Metrology for IC Manufacturing |
Monday 2:00pm | MS-MoA | Challenges in Semiconductor Manufacturing for the First Decade of the 21st Century |
Tuesday 2:00pm | IE-TuA | Green Manufacturing |
Wednesday 8:20am | DI+EL+MS-WeM | Low K Dielectrics |
Wednesday 8:20am | IE+PS+MS+SE-WeM | Environmentally Friendly Process Development |
Wednesday 8:20am | PS+MS-WeM | Plasma-Induced Damage |
Wednesday 2:00pm | MS-WeA | Process Integration (Cu/Low-k/300mm) |
Wednesday 2:00pm | DI+EL+MS-WeA | Alternate Gate Dielectrics |
Wednesday 2:00pm | PS1+MS-WeA | Sensors and Control in Plasma Processing |
Thursday 8:20am | MS-ThM | Advanced Modeling and Control for IC Manufacturing |
Thursday 8:20am | DI+EL+MS-ThM | Ultrathin Dielectrics and Interfaces |
Thursday 2:00pm | MS-ThA | Advanced Modeling for IC Manufacturing |
Thursday 2:00pm | DI+EL+MS-ThA | High K Dielectrics: Perovskites |
Friday 8:20am | MS-FrM | Langmuir Award/Ultra Clean Society and Contamination Free Manufacturing |