| AVS 47th International Symposium | |
| Dielectrics | Thursday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 2:00pm | DI+EL+MS-ThA1 Invited Paper High Density Thin Film Ferroelectric Nonvolatile Memories R. Ramesh, University of Maryland |
| 2:40pm | DI+EL+MS-ThA3 Process Window Extension of TiN Diffusion Barrier using Pre-oxidation of Ru and RuO@sub x@ Film for (Ba,Sr)TiO@sub 3@ Dielectric Film D.-S. Yoon, H.J. Kim, S. Kim, Hyundai Electronics Industries Co. Ltd., Korea |
| 3:00pm | DI+EL+MS-ThA4 Atomic Polarization and Screening Charge by Variable Temperature Scanning Probe Microscopy of Ferroelectric Surfaces S.V. Kalinin, D.A. Bonnell, University of Pennsylvania |
| 3:20pm | DI+EL+MS-ThA5 Invited Paper Film-formation Mechanisms, Microstructure, and Properties of BST Thin Films Grown By MOCVD Y. Gao, Pacific Northwest National Laboratory |
| 4:00pm | DI+EL+MS-ThA7 Epitaxial (Ba,Sr)TiO@sub 3@ on MgO for Room Temperature Microwave Phase Shifters C.L. Chen, J. Shen, S.Y. Chen, C.W. Chu, University of Houston, F.W. Van Keuls, F. Miranda, NASA Glenn Research Center, J.C. Jiang, Louisiana State University |
| 4:20pm | DI+EL+MS-ThA8 High Temperature Etch Processing for FeRAM MFM Capacitor Stack Fabrication L.G. Jerde, A. Cofer, R.A. Ditizio, S. Marks, J.A. Meyer, K.A. Olson, S.P. DeOrnellas, Tegal Corporation |