AVS 47th International Symposium
    Manufacturing Science and Technology Monday Sessions

Session MS-MoA
Challenges in Semiconductor Manufacturing for the First Decade of the 21st Century

Monday, October 2, 2000, 2:00 pm, Room 304
Moderator: C.R. Brundle, Applied Materials

  Click here to Download program book for this session  
  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

2:00pm MS-MoA1 Invited Paper
Chips to Power the Peta-bit Network
D. Eaglesham, Lucent
2:40pm MS-MoA3 Invited Paper
SOI or USJ?: Laminated Electronics for "Post-Roadmap" CMOS
M.I. Current, S.W. Bedell, I.J. Malik, F.J. Henley, Silicon Genesis
3:20pm MS-MoA5 Invited Paper
The Viability of sub-50nm CMOS Technology
G. Timp, J. Bude, F. Baumann, D. Muller, Y. Kim, M.L. Green, T. Sorsch, D.M. Tennant, R. Kleiman, Bell Laboratories, Lucent Technologies, W. Timp, Massachusetts Institute of Technology, P. Silverman, B.E. Weir, Bell Laboratories, Lucent Technologies
4:00pm MS-MoA7 Invited Paper
Technology for Wired and Wireless Networks
S. Subbanna, B. Meyerson, IBM Microelectronics
4:40pm MS-MoA9 Invited Paper
Process Integration Challenges in a Copper/Low-K World
R.A. Powell, Novellus Systems