AVS 64th International Symposium & Exhibition, Plasma Science and Technology Division Sessions

Plasma Science and Technology Division Sessions

Click a session title to see the papers

Start Time	Session Code	Session Title
Monday 8:20am	PS+AS+SE-MoM	Atmospheric Pressure Plasmas
Monday 8:20am	PS+AS-MoM	Plasma Processing of Challenging Materials
Monday 1:40pm	PS+AS+SS-MoA	Plasma Surface Interactions
Monday 1:40pm	PB+BI+PS-MoA	Plasma Agriculture & Processing of Biomaterials
Tuesday 8:00am	PS-TuM	Advanced FEOL/Gate Etching
Tuesday 8:00am	PB+BI+PS-TuM	Plasma Medicine
Tuesday 2:20pm	PS+SS-TuA	The Science of Plasmas and Surfaces: Commemorating the Career of Harold Winters (ALL INVITED SESSION)
Tuesday 2:20pm	NS+EM+MN+PS+SS-TuA	Nano-Photonics, Plasmonics and Mechanics
Tuesday 6:30pm	PS-TuP	Plasma Science and Technology Poster Session
Wednesday 8:00am	PS+NS+SS-WeM	Plasma Processing for Nanomaterials & Nanoparticles
Wednesday 8:00am	PS-WeM	Advanced BEOL/Interconnect Etching
Wednesday 2:20pm	PS+SS+TF-WeA	Plasma Deposition
Wednesday 2:20pm	PS-WeA	Modeling of Plasmas
Thursday 8:00am	PS+NS+SS+TF-ThM	Atomic Layer Etching I
Thursday 8:00am	PS-ThM	Plasma Sources
Thursday 8:00am	SE+PS+SS-ThM	Plasma-assisted Surface Modification and Deposition Processes
Thursday 2:20pm	PS+TF-ThA	Plasma Enhanced ALD
Thursday 2:20pm	PS+VT-ThA	Plasma Diagnostics, Sensors and Control
Friday 8:20am	PS+NS+SS+TF-FrM	Atomic Layer Etching II