| AVS 64th International Symposium & Exhibition | |
| Plasma Science and Technology Division | Wednesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 2:20pm | PS+SS+TF-WeA1 Correlation Between Ion Energies in CCRF Discharges and Film Characteristics of Titanium Oxides Fabricated via Plasma Enhanced Atomic Layer Deposition Shinya Iwashita, T. Moriya, T. Kikuchi, N. Noro, T. Hasegawa, Tokyo Electron Limited, Japan, A. Uedono, University of Tsukuba, Japan |
| 2:40pm | PS+SS+TF-WeA2 Functionalized Titanium-Nitride Surfaces Formed by Femtosecond-Laser Processing David Ruzic, S. Hammouti, B.J. Holybee, University of Illinois at Urbana-Champaign, B.E. Jurczyk, Starfire Industries |
| 3:00pm | PS+SS+TF-WeA3 Controlling the Thin Film Properties of Silica Synthesised by Atmospheric Pressure-Plasma Enhanced CVD Fiona Elam, A.S. Meshkova, FOM institute DIFFER, Netherlands, B.C.A.M. van der Velden-Schuermans, S.A. Starostin, FUJIFILM Manufacturing Europe B.V., M.C.M. van de Sanden, H.W. de Vries, FOM Institute DIFFER, Netherlands |
| 3:20pm | PS+SS+TF-WeA4 Plasma Information Based Virtual Metrology for Nitride Thickness in Multi-Layer Plasma-Enhanced Chemical Vapor Deposition Hyun-Joon Roh, S. Ryu, Y. Jang, N.-K. Kim, Y. Jin, G.-H. Kim, Seoul National University, Republic of Korea |
| 4:20pm | PS+SS+TF-WeA7 Invited Paper Sidewall Effects in the Modulation of Deposition Rate Profiles of a Capacitively Coupled Plasma Reactor Hojun Kim, Samsung Electronics Co. Ltd., Republic of Korea |
| 5:20pm | PS+SS+TF-WeA10 Linear Magnetron Magnetic Field Optimization for HiPIMS Industrialization Ian Haehnlein, J. McLain, B. Wu, I. Schelkanov, University of Illinois at Urbana-Champaign, B.E. Jurczyk, Starfire Industries, D.N. Ruzic, University of Illinois at Urbana-Champaign |
| 5:40pm | PS+SS+TF-WeA11 Investigating the Effect of the Substrate at Short Deposition Times for Plasma Polymerised Films Karyn Jarvis, N.P. Reynolds, Swinburne University of Technology, Australia, L.D. Hyde, Melbourne Centre for Nanofabrication, Australia, S.L. McArthur, Swinburne University of Technology and CSIRO, Australia |