| AVS 64th International Symposium & Exhibition | |
| Plasma Science and Technology Division | Thursday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 8:00am | PS-ThM1 New Plasma Source Generating High Radical Flux With Low Ion and Photon Flux Y. Pilloux, David Lishan, M. Segers, Plasma-Therm LLC |
| 8:20am | PS-ThM2 Towards Plug-and-Play Tailored Voltage Waveform Plasma Sources: Progress in Matching and Calibration Erik V. Johnson, LPICM, Ecole Polytechnique, France, K. Yamaki, LPP-CNRS, J.-P. Booth, LPP-CNRS, Ecole Polytechnique, France |
| 8:40am | PS-ThM3 Selective Radical Production in Remote Plasma Sources Shuo Huang, University of Michigan, V. Volynets, S. Lee, S. Nam, S. Lu, Samsung Electronics Co. Ltd., Republic of Korea, M.J. Kushner, University of Michigan |
| 9:00am | PS-ThM4 On Electron Heating in Magnetron Sputtering Discharges Jon Tomas Gudmundsson, University of Iceland, D. Lundin, Université Paris-Sud, France, M.A. Raadu, KTH-Royal Institute of Technology, Sweden, T.M. Minea, Université Paris-Sud, France, N. Brenning, KTH-Royal Institute of Technology, Sweden |
| 9:20am | PS-ThM5 Invited Paper High-Density Plasma Generation in Low-Pressure Metamaterial Space Osamu Sakai, The University of Shiga Prefecture, Japan |
| 11:00am | PS-ThM10 Optical Emission Spectroscopy of a Spark-coupled Laser Aluminum Plasma for Multicharged Ion Generation Md Mahmudur Rahman, O. Balki, M. Shaim, H.E. Ali, Old Dominion University |
| 11:40am | PS-ThM12 Invited Paper Effect of Secondary Electrons on the Ionization Dynamics and Control of Ion Properties in Electronegative Capacitive Discharges Aranka Derzsi, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Hungary |