| AVS 64th International Symposium & Exhibition | |
| Plasma Science and Technology Division | Tuesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 2:20pm | PS+SS-TuA1 History and Legacy of the Coburn and Winters Paper R.Mohan Sankaran, Case Western Reserve University, M.C.M. van de Sanden, FOM Institute DIFFER, Netherlands |
| 2:40pm | PS+SS-TuA2 The Reaction of Fluorine Atoms with Silicon: Controversies 38 Years in the Making Vincent M. Donnelly, University of Houston |
| 3:00pm | PS+SS-TuA3 The Long Quest to Understand Etch Mechanisms and Surface Science: The Legacy of Harold Winters and its Impact on Semiconductor Industry Sebastian Engelmann, N.C.M. Fuller, IBM Research Division, T.J. Watson Research Center |
| 3:20pm | PS+SS-TuA4 Surface Science Aspects of (Plasma) ALD reactions V. Vandalon, M.C.M. van de Sanden, Erwin Kessels, Eindhoven University of Technology, The Netherlands |
| 4:20pm | PS+SS-TuA7 Harold Winters and Plasma-Surface Interactions David Graves, University of California at Berkeley |
| 4:40pm | PS+SS-TuA8 Illuminating the Black Box: Plasma-Surface Interactions at the Atomic Scale Jane Chang, UCLA |
| 5:00pm | PS+SS-TuA9 Controlling Low Temperature Plasma Surface Interactions for Atomic Layer Etching of Electronic Materials And Atmospheric Pressure Plasma-Treatments of Model Polymers and Biomolecules Gottlieb S. Oehrlein, University of Maryland, College Park |
| 5:20pm | PS+SS-TuA10 H-induced Defect Kinetics in a-Si:H: Obtaining Kinetic Parameters from Temperature-Dependent Data F.J.J. Peeters, DIFFER, Netherlands, J. Zheng, Peking University, China, I.G.M. Aarts, ASML, A.C.R. Pipino, ONR, W.M.M. Kessels, Eindhoven University of Technology, Netherlands, Richard van de Sanden, DIFFER, Netherlands |
| 5:40pm | PS+SS-TuA11 Translating Fundamental Science to Technology Development in Plasma Assisted Materials Processing: Contributions by Harold Winters and Their Impact on Modeling Mark Kushner, C.M. Huard, S.J. Lanham, S. Huang, P. Tian, University of Michigan |
| 6:00pm | PS+SS-TuA12 Extending the Legacy of Harold Winters: Probing the Energetics and Plasma-Surface Interface of Halogenated Plasmas Ellen Fisher, Colorado State University |