AVS 63rd International Symposium & Exhibition, Plasma Science and Technology Sessions

Plasma Science and Technology Sessions

Click a session title to see the papers

Start Time	Session Code	Session Title
Monday 8:20am	PS+SE-MoM	Atmospheric Pressure Plasma Processing
Monday 8:20am	PS-MoM	Advanced FEOL/Gate Etching
Monday 8:20am	EM+NS+PS+SS+TF-MoM	Growth and Devices Technology of Group III-Nitrides
Monday 1:40pm	PS+AS+SS-MoA	Plasma Surface Interactions
Monday 1:40pm	PS-MoA	Advanced BEOL/Interconnect Etching
Monday 1:40pm	PB+BI+PS-MoA	Plasma Processing of Biomaterials
Monday 1:40pm	TF+PS+SE-MoA	Plasma-based Deposition Techniques and Film Characterization
Tuesday 8:00am	PS-TuM	Plasma Diagnostics, Sensors and Control
Tuesday 8:00am	PB+BI+PS-TuM	Plasma Processing of Biological/Biomimetic Surfaces
Tuesday 2:20pm	PS+2D-TuA	Plasma Processing for Nanomaterials and 2D Materials
Wednesday 8:00am	PS+TF-WeM	Atomic Layer Etching
Wednesday 8:00am	PS-WeM	Plasma Sources and Novel Mechanisms for Generating Plasmas
Wednesday 2:20pm	PS+TF-WeA	Plasma Deposition and Plasma Assisted ALD
Wednesday 2:20pm	PS-WeA	Atomic Layer Etching and Low Damage Processing
Thursday 8:00am	PS1-ThM	Modeling of Plasmas and Plasma-Surface Interactions
Thursday 8:00am	PS2-ThM	Plasma Processing of Challenging Materials
Thursday 2:20pm	PS-ThA	Plasma Chemistry and Plasma Surface Interactions
Thursday 6:00pm	PS-ThP	Plasma Science and Technology Division Poster Session